Other Dry Etching Recipes: Difference between revisions
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=[[XeF2 Etch (Xetch)]]= |
=[[XeF2 Etch (Xetch)]]= |
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*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
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=[[Vapor HF Etch (uETCH)]]= |
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*[[media:|Si Etch Recipe]] |
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