Other Dry Etching Recipes: Difference between revisions
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*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
*[[media:06-XeF2-etch-recipe.pdf|Si Etch Recipe]] |
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=[[Vapor HF Etch (uETCH)]]= |
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*[[media:25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-1.pdf|SiO<sub>2</sub> Etch Recipe]] |
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=[[Vapor HF Etch (uETCH)]]= |
=[[Vapor HF Etch (uETCH)]]= |
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*[[media:|SiO<sub>2</sub> Etch Recipe]] |
*[[media:|SiO<sub>2</sub> Etch Recipe]] |
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Revision as of 17:03, 30 January 2014
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
Vapor HF Etch (uETCH)
- [[media:|SiO2 Etch Recipe]]