Other Dry Etching Recipes
From UCSB Nanofab Wiki
Revision as of 21:03, 22 July 2015 by
Ningcao
(
talk
|
contribs
)
(
→CAIBE (Oxford Ion Mill)
)
(
diff
)
← Older revision
|
Latest revision
(
diff
) |
Newer revision →
(
diff
)
Jump to navigation
Jump to search
Back to
Dry Etching Recipes
.
XeF2 Etch (Xetch)
Si Etch Recipe
Vapor HF Etch (uETCH)
SiO
2
Etch Recipe 1
SiO
2
Etch Recipe 2
CAIBE (Oxford Ion Mill)
Pt Etch Recipe
Category
:
Recipes
Navigation menu
Personal tools
Create account
Log in
Namespaces
Page
Discussion
English
Views
Read
View source
View history
More
Search
InvisibleMenu
QuickLinks
Lab Rules
Common Questions/FAQ
Staff List
Equipment Signup
Chemicals + MSDS
Equipment
Full Tool List
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
Packaging
Metrology & Test
Recipes and Data
Lithography
Vacuum Deposition
Dry Etching
Wet Etching
Thermal Processing
Packaging Tools
Data + Info
Process Control Data
Calculators/Utilities
NanoFab Info
Research + Pubs
Tech Talks
Tools
What links here
Related changes
Special pages
Printable version
Permanent link
Page information