Sputter 5 (AJA ATC 2200-V)

From UCSB Nanofab Wiki

Revision as of 21:05, 1 May 2018 by Bosch t (talk | contribs) (Bosch t moved page Sputter 5 (Lesker AXXIS) to Sputter 5 (AJA ATC 2200-V): New Tool Listing)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

==

Heading text

==

Heading text

====
==

Sputter 5 (AJA ATC 2200-V)

Tool Type	Vacuum Deposition
Location	Bay 3
Supervisor	Tony Bosch
Supervisor Phone	(805) 893-3486
Supervisor E-Mail	bosch@ece.ucsb.edu

Description	?
Manufacturer	AJA ATC 2200-V
Vacuum Deposition Recipes

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Sputter_5_(AJA_ATC_2200-V)&oldid=155079"