Other Dry Etching Recipes

Back to Dry Etching Recipes.

XeF2 Etch (Xetch)

• Si Etch Recipe

Vapor HF Etch (uETCH)

• SiO₂ Etch Recipe 1
• SiO₂ Etch Recipe 2

CAIBE (Oxford Ion Mill)

• Remind: From now on, one should always use Prf=200W! (see Brian Lingg for explanation)
• Pt Etch Recipe
• Au Etch Recipe
• Ni Etch Recipe