Template:LithRecipe Table
Jump to navigation
Jump to search
| width="100" bgcolor="#DAF1FF" | Suss Aligners
| width="100" bgcolor="#DAF1FF" | Contact Aligner
| width="100" bgcolor="#DAF1FF" | Stepper 1
(GCA 6300)
| width="100" bgcolor="#DAF1FF" | Stepper 2
(AutoStep 200)
| width="100" bgcolor="#DAF1FF" | Stepper 3
(ASML DUV)
| width="100" bgcolor="#DAF1FF" | DUV Flood
| width="175" bgcolor="#DAF1FF" | Field Emission SEM 1
(FEI Sirion)
| width="175" bgcolor="#DAF1FF" | E-Beam Lithography System
(JEOL JBX-6300FS)