RIE Etching Recipes

From UCSB Nanofab Wiki

Revision as of 22:48, 19 September 2013 by Ningcao (talk | contribs) (→‎GaN Etching (RIE#5))

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

Back to Dry Etching Recipes.

RIE 1 (Custom)

RIE 2 (MRC)

RIE 3 (MRC)

RIE 5 (PlasmaTherm)

GaN Etching (RIE 5)

GaN Etch Recipe

Si Deep RIE (PlasmaTherm/Bosch Etch)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=RIE_Etching_Recipes&oldid=3012"

Recipes