ICP Etching Recipes
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Dry Etching Recipes
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Contents
1
ICP Etch 1 (Panasonic E626I)
1.1
SiO
2
Etching (Panasonic 1)
1.2
Cr Etch (Panasonic 1)
1.3
GaN Etch (Panasonic 1)
2
ICP Etch 2 (Panasonic E640)
2.1
SiO
2
Etching (Panasonic 2)
3
ICP-Etch (Unaxis VLR)
3.1
InP Etch (Unaxis VLR)
3.1.1
InP Etch
3.1.2
InP Etch (H
2
Ar)
ICP Etch 1 (Panasonic E626I)
SiO
2
Etching (Panasonic 1)
SiO
2
Vertical Etch Recipe
SiO
2
CHF3 Etch Variations
Cr Etch (Panasonic 1)
Cr Etch Recipes
GaN Etch (Panasonic 1)
GaN Etch Recipes
ICP Etch 2 (Panasonic E640)
SiO
2
Etching (Panasonic 2)
SiO
2
Vertical Etch Recipe
ICP-Etch (Unaxis VLR)
InP Etch (Unaxis VLR)
InP Etch
InP Etch Recipe (200C)
InP Etch (H
2
Ar)
InP Etch Recipe (H
2
Ar 200C)
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