Back to Dry Etching Recipes.
Single-step Si Etching (not Bosch Process!) (Si Deep RIE)
SiO2 Etching (Panasonic 1)
Al Etch (Panasonic 1)
Cr Etch (Panasonic 1)
Ti Etch (Panasonic 1)
AlGaAs Etch (Panasonic 1)
GaN Etch (Panasonic 1)
SiO2 Etching (Panasonic 2)
Al Etch (Panasonic 2)
GaAs Etch
InP Etch (Unaxis VLR)
InP Etch
InP Etch (H2 Ar)
GaN Etch (Unaxis VLR)