DUV Flood Expose

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DUV Flood Expose Tool Type Lithography Location Bay 6 Supervisor Mike Silva Supervisor Phone (805) 893-3096 Supervisor E-Mail silva@ece.ucsb.edu Description Deep UV Flood Exposer / Light source and HA-1KC2 power supply Manufacturer AB Manufacturing

About

This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.

Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.

Detailed Specifications

• DUV wavelengths are 200-260 nm; the lamp power is limited to either 1250 or 2100 watts and can operate in either constant intensity or constant power mode
• The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
• Exposure can be performed on a 4" wafer
• Lamps are nominally rated for 400 hours
• A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation

Spectra Images

Aligner with No Filter

Aligner with No Filter

Aligner with Filter for i-line Exposure

Aligner with Filter for i-line Exposure

DUV Exposure System Spectra

DUV Exposure System Spectra