Template:Announcements

Equipment Status

Suss Bonder

Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)

KLA Tencor Surfscan

The system is down. The vendor has located a replacement PCB. Once the board is secured, the vendor will schedule a visit and finish the system repairs. // Silva 21:51, 11 February 2019 (PST)

E-Beam#1

The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. // Silva 21:45, 11 February 2019 (PST)

RIE#5

The system is down. The system has a wafer transfer error. The system will be looked at tomorrow. Silva 10:11, 18 February 2019 (PST)

IBD

The system is down. The load lock ion gauge has failed. The gauge will be replaced tomorrow. Silva 10:11, 18 February 2019 (PST)

ASML DUV: PM March 12 to 15th

ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. // John d 11:02, 15 February 2019 (PST)