Template:Announcements
Equipment Status
Suss Bonder
Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)
E-Beam#1
The power supply and IC5 controller retrofit is complete. Every user will need to be trained to use the tool. It is now similar to E-beam #4. If you absolutely need to use the tool this weekend, Brian Lingg will hold a training session today, March 1, 2019, at 4PM. Please reply to Brian's email invitation if you’d like to attend the training session. Brian Lingg will hold many more training sessions next week, starting on Monday. Brian will send out an email announcing specific times for training Monday morning. The following materials have been setup. Ti, Au, Al, Ni, Cr, Pt, Ag, Ta, C, V. Brian will add more next week. Silva 15:36, 1 March 2019 (PST)
ASML DUV: PM March 12 to 15th
ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. // John d 11:02, 15 February 2019 (PST)
Advanced Vacuum PECVD
The system is down. It has been reported the system chamber will not vent. We will take a look at it tomorrow morning. Silva 10:27, 3 March 2019 (PST)
RIE#5
The system is down. It has been reported that a sample is broken inside the process chamber. The issue will be addressed to tomorrow. Silva 10:29, 3 March 2019 (PST)