UV Ozone Reactor

UV Ozone Reactor Tool Type Dry Etch Location Bay 5 Supervisor Lee Sawyer Supervisor Phone (805) 893-2123 Supervisor E-Mail lee_sawyer@ucsb.edu Description UV Ozone Reactor Manufacturer Jelight Model M-144AX Dry Etch Recipes

About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Documentation

• Quick Start
• UV Ozone Manual