YES-SPR220-Various-Temps

From UCSB Nanofab Wiki

Revision as of 16:35, 5 June 2023 by Ffoong (talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

Pressure drop indicates completion of etch. Once pressure flattens etching is complete.

Positive PR 220-7 etch rates vs set point temperature

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=YES-SPR220-Various-Temps&oldid=161141"