PECVD Recipes

Back to [[{{{1}}} Recipes]].

PECVD 1 (PlasmaTherm 790)

SiN deposition (PECVD #1)

• SiN Deposition Recipe
• SiN Deposition Particle Thickness Data

SiO₂ deposition (PECVD #1)

• SiO₂ Deposition Recipe
• SiO₂ Deposition Particle Thickness Data

PECVD 2 (Advanced Vacuum)

SiN deposition (PECVD #2)

• SiN Deposition Recipe
• SiN Deposition Particle Thickness Data

SiO₂ deposition (PECVD #2)

• SiO₂ Deposition Recipe
• SiO₂ Deposition Particle Thickness Data

ICP-PECVD (Unaxis VLR)

SiN deposition (Unaxis VLR)

• SiN Deposition Recipe (5W High Stress)
• SiN Deposition Recipe (50W Medium Stress)
• SiN Deposition Recipe (120W Low Stress)