RIE Etching Recipes
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Revision as of 17:37, 18 July 2012 by
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RIE 1 (Custom)
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RIE 2 (MRC)
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RIE 3 (MRC)
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RIE 5 (PlasmaTherm)
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Si Deep RIE (PlasmaTherm/Bosch Etch)
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Back to [[{{{1}}} Recipes]].
Contents
1
RIE 1 (Custom)
2
RIE 2 (MRC)
3
RIE 3 (MRC)
4
RIE 5 (PlasmaTherm)
5
Si Deep RIE (PlasmaTherm/Bosch Etch)
RIE 1 (Custom)
RIE 2 (MRC)
RIE 3 (MRC)
RIE 5 (PlasmaTherm)
Si Deep RIE (PlasmaTherm/Bosch Etch)
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