RIE Etching Recipes

From UCSB Nanofab Wiki

Revision as of 13:32, 17 August 2012 by Zwarburg (talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

Back to Dry Etching Recipes.

RIE 1 (Custom)

RIE 2 (MRC)

RIE 3 (MRC)

RIE 5 (PlasmaTherm)

Si Deep RIE (PlasmaTherm/Bosch Etch)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=RIE_Etching_Recipes&oldid=1984"

Recipes