User contributions for Ningcao

3 February 2021

• 01:3701:37, 3 February 2021 diff hist +59‎ Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎No edit summary current Tag: Visual edit
• 01:3601:36, 3 February 2021 diff hist +4‎ Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎No edit summary Tag: Visual edit
• 01:3601:36, 3 February 2021 diff hist +259‎ N Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
• 01:3501:35, 3 February 2021 diff hist +11‎ ICP Etching Recipes ‎ →‎Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
• 01:3301:33, 3 February 2021 diff hist +4‎ Test Data of etching SiO2 with CHF3/CF4-Florine ‎No edit summary current Tag: Visual edit
• 01:3001:30, 3 February 2021 diff hist +4‎ Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎No edit summary current Tag: Visual edit
• 01:2901:29, 3 February 2021 diff hist +59‎ Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ adding a SEM Tag: Visual edit
• 01:2701:27, 3 February 2021 diff hist 0‎ N File:FE210206.pdf ‎No edit summary current
• 01:1801:18, 3 February 2021 diff hist +259‎ N Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher ‎ Created page with "{| class="wikitable" | colspan="6" |Florine ICP: 3.8mT, 50/800W, CHF3/CF4=10/30sccm, time=90 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit

2 February 2021

• 23:5323:53, 2 February 2021 diff hist +16‎ Test Data of etching SiO2 with CHF3/CF4-Florine ‎No edit summary Tag: Visual edit
• 23:5023:50, 2 February 2021 diff hist −6‎ Test Data of etching SiO2 with CHF3/CF4-Florine ‎No edit summary Tag: Visual edit
• 23:4723:47, 2 February 2021 diff hist +250‎ N Test Data of etching SiO2 with CHF3/CF4-Florine ‎ Created page with "{| class="wikitable" | colspan="5" |ICP#2: 0.5Pa, 50/500W, CHF3/CF4/O2=35/5/10sccm, time=210 sec |- |Date |Sample# |Etch Rate (nm/min) |Etch Selectivity (SiO2/PR) |Averaged..." Tag: Visual edit
• 23:3923:39, 2 February 2021 diff hist +52‎ ICP Etching Recipes ‎ →‎Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
• 23:2623:26, 2 February 2021 diff hist −1‎ ICP Etching Recipes ‎ →‎Historical Data (SiO2, Florine ICP Etcher)
• 23:2523:25, 2 February 2021 diff hist +53‎ ICP Etching Recipes ‎ →‎Historical Data (SiO2, Florines ICP Etcher)
• 23:2223:22, 2 February 2021 diff hist +49‎ ICP Etching Recipes ‎ →‎PlasmaTherm/SLR Fluorine Etcher

9 January 2021

• 02:4202:42, 9 January 2021 diff hist +59‎ Test Data of etching SiO2 with CHF3/CF4 ‎ add a SEM pic Tag: Visual edit
• 02:4102:41, 9 January 2021 diff hist 0‎ N File:I2210102.pdf ‎No edit summary current
• 02:3902:39, 9 January 2021 diff hist +59‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ add a SEM pic Tag: Visual edit
• 02:3702:37, 9 January 2021 diff hist 0‎ N File:I1210113.pdf ‎No edit summary current
• 00:4500:45, 9 January 2021 diff hist +36‎ Test Data of etching SiO2 with CHF3/CF4 ‎ adding a data point Tag: Visual edit
• 00:4400:44, 9 January 2021 diff hist +36‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ add a data poing Tag: Visual edit

31 August 2020

• 01:5501:55, 31 August 2020 diff hist +59‎ InP Etch Rate and Selectivity (InP/SiO2) ‎ add a Sem PIC Tag: Visual edit
• 01:5401:54, 31 August 2020 diff hist 0‎ N File:IP020104.pdf ‎No edit summary current
• 01:5001:50, 31 August 2020 diff hist +38‎ InP Etch Rate and Selectivity (InP/SiO2) ‎ add a data point Tag: Visual edit

11 August 2020

• 00:2100:21, 11 August 2020 diff hist +10‎ Test Data of etching SiO2 with CHF3/CF4 ‎No edit summary Tag: Visual edit
• 00:2100:21, 11 August 2020 diff hist +27‎ Test Data of etching SiO2 with CHF3/CF4 ‎ a comment added Tag: Visual edit
• 00:1900:19, 11 August 2020 diff hist +59‎ Test Data of etching SiO2 with CHF3/CF4 ‎ add a SEM Tag: Visual edit
• 00:1800:18, 11 August 2020 diff hist 0‎ N File:I2200203.pdf ‎No edit summary current
• 00:1200:12, 11 August 2020 diff hist +36‎ Test Data of etching SiO2 with CHF3/CF4 ‎ add a etch data point Tag: Visual edit

31 July 2020

• 22:5922:59, 31 July 2020 diff hist −30‎ Dry Etching Recipes ‎No edit summary
• 22:5622:56, 31 July 2020 diff hist +72‎ Dry Etching Recipes ‎No edit summary
• 22:4322:43, 31 July 2020 diff hist 0‎ Dry Etching Recipes ‎ add a recipe Tag: Visual edit
• 22:3622:36, 31 July 2020 diff hist 0‎ N File:InP Etching result-CAIBE.pdf ‎No edit summary current
• 22:2722:27, 31 July 2020 diff hist +3‎ Other Dry Etching Recipes ‎ add a etch recipe Tag: Visual edit
• 22:1422:14, 31 July 2020 diff hist +73‎ Other Dry Etching Recipes ‎ →‎CAIBE (Oxford Ion Mill): add a recipe file Tag: Visual edit
• 22:1022:10, 31 July 2020 diff hist +17‎ Other Dry Etching Recipes ‎ →‎CAIBE (Oxford Ion Mill): add a recipe Tag: Visual edit

24 March 2020

• 18:0418:04, 24 March 2020 diff hist +179‎ Ning Cao ‎ →‎About: add some information Tag: Visual edit

6 March 2020

• 22:3622:36, 6 March 2020 diff hist +281‎ Other Dry Etching Recipes ‎ add a comment Tag: Visual edit

3 March 2020

• 19:1819:18, 3 March 2020 diff hist −1‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎No edit summary Tag: Visual edit
• 19:1719:17, 3 March 2020 diff hist +59‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ add a SEM Tag: Visual edit
• 19:1619:16, 3 March 2020 diff hist 0‎ N File:I1200415.pdf ‎No edit summary current
• 19:1519:15, 3 March 2020 diff hist +37‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ adda data point Tag: Visual edit

28 February 2020

• 22:4222:42, 28 February 2020 diff hist +62‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ add a pic Tag: Visual edit
• 22:4122:41, 28 February 2020 diff hist 0‎ N File:I1200301.pdf ‎No edit summary current
• 22:4022:40, 28 February 2020 diff hist +4‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎No edit summary Tag: Visual edit
• 22:3522:35, 28 February 2020 diff hist +37‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ add a data point Tag: Visual edit

23 January 2020

• 22:3722:37, 23 January 2020 diff hist +62‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ adding a pic Tag: Visual edit
• 22:3622:36, 23 January 2020 diff hist 0‎ N File:I1200211.pdf ‎No edit summary current
• 22:3622:36, 23 January 2020 diff hist +37‎ Test Data of etching SiO2 with CHF3/CF4-ICP1 ‎ adding data Tag: Visual edit