Template:Announcements

Equipment Status

Suss Bonder

Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)

ASML DUV: PM March 12 to 15th

ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. Silva 21:22, 4 March 2019 (PST)

GCA 6300 Stepper Maintenance

The GCA 6300 Stepper maintenance is scheduled to start Monday April 1, 2019 at 8:30 am. The service should be finished by Wednesday April 3, 2019 at 6:00 pm. Please schedule you process accordingly. Silva 17:56, 5 March 2019 (PST)

GCA Autostep 200 Maintenance

The GCA Autostep 200 maintenance is scheduled to start Monday April 4, 2019 at 8:30 am. The service should be finished the same day by 6:00 pm. Please schedule you process accordingly. Silva 17:56, 5 March 2019 (PST)

IBD Maintenance

The IBD will be down starting Monday March 11, 2019 at 9:00 am for maintenance. This system service will take two to three weeks to complete. Silva 10:22, 7 March 2019 (PST)

ICP Panasonic #2 Chamber Clean

The system will be down starting Monday morning at 9:30 am for a chamber wet clean. The tool should be ready by 11:30 am the same morning for your use. Silva 11:50, 7 March 2019 (PST)