DUV Flood Expose

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DUV Flood Expose Tool Type Lithography Location Bay 6 Supervisor Lee Sawyer Supervisor Phone (805) 893-2123 Supervisor E-Mail lee_sawyer@ucsb.edu Description 1000W Deep UV Flood Exposure System (LS-150X-10C2) and Illumination Controller (2130-C2) Manufacturer Bachur & Associates/AB Manufacturing

About

This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.

Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.

Detailed Specifications

• DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode
• The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
• Exposure can be performed on a 4" wafer
• Lamps are nominally rated for 400 hours
• A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation

Spectra Images

DUV Exposure System Spectra

DUV Exposure System Spectra

Documentation

• DUV Flood Expose Standard Operating Procedure