Rapid Thermal Processor (SSI Solaris 150)

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Rapid Thermal Processor (SSI Solaris 150) Tool Type Thermal Processing Location Bay 5 Supervisor Brian Lingg Supervisor Phone (805) 893-8145 Supervisor E-Mail lingg_b@ucsb.edu Description Rapid Thermal Annealing (RTA) Manufacturer SSI Model Solaris 150 Thermal Processing Recipes Sign up for this tool

Detailed Specificiations

To Do: list of specs, wafer sizes etc.

Operating Instructions

• Solaris 150 Operating Procedure
• User manual