UV Ozone Reactor

UV Ozone Reactor Location Bay 5 Tool Type Dry Etch Manufacturer Jelight Model M-144AX Description UV Ozone Reactor Primary Supervisor Lee Sawyer (805) 893-2123 lee_sawyer@ucsb.edu Secondary Supervisor Tony Bosch Recipes Dry Etch Recipes

About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Documentation

• Quick Start
• UV Ozone Manual