UV Ozone Reactor

From UCSB Nanofab Wiki
Revision as of 17:52, 30 August 2022 by Silva (talk | contribs)
Jump to navigation Jump to search
UV Ozone Reactor
Location Bay 5
Tool Type Dry Etch
Manufacturer Jelight
Model M-144AX
Description UV Ozone Reactor
Primary Supervisor Lee Sawyer
(805) 893-2123
lee_sawyer@ucsb.edu

Secondary Supervisor

Tony Bosch

Recipes Dry Etch Recipes


About

The UV Ozone is manufactured by Jelight, model M-144AX. It can be used for Oxygen activation, etching or oxidation of a surface without ion bombardment.

Documentation

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=UV_Ozone_Reactor&oldid=160341"