Oven 4 (Thermo-Fisher HeraTherm)

Oven 4 (Thermo-Fisher HeraTherm) Location Bay 6 Tool Type Lithography Manufacturer Thermo Scientific Model HeraTherm Description Programmable Oven Primary Supervisor Michael Barreraz (805) 893-4147 mikebarreraz@ece.ucsb.edu Secondary Supervisor Aidan Hopkins Recipes SignupMonkey: Sign up for this tool

About

This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.

Specifications

• Maximum Temperature = 330 C (no active cooling)
• Gases: N2, manually set with needle valve (not programmable)
• Multi-step programmable temperature ramps
• Programmable atmospheric purge (for cooling)

Documentation

Instructions