YES-SPR220-Various-Temps
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Revision as of 16:30, 5 June 2023 by
Ffoong
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(add 220-7 etch rates vs temperature)
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Pressure drop indicates completion of etch. Once pressure flattens etching is complete.
551.989x551.989px
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_vs._Temp(C)_Recipe_STD_O2only_3KW-3min-Temp_(1).png)