Template:Announcements
DSE is UP
I’ve completed the installation of the new spool and lamps and the tool is free to use. We’ve run a number of different etches and upon initial inspection everything looks normal. However, it’s recommended you start with a test etch in case there is a slight shift in process.
Thanks, Aidan // Demis D. John 12:36, 20 September 2024 (PDT)
IBD is UP
Replaced bad PLC controller on Depo beam. I then tested the beam with a 15 min gridclean recipe without issue. I then ran an SiO2 dep, and a 1 hour gridclean without issue.
System UP - Mike Barreraz // Demis D. John 14:18, 12 September 2024 (PDT)
Focused Ion Beam (Raith Velion) - TOOL DOWN for Raith Service
Raith service need to work on the Velion a little longer than anticipated. I'll keep the tool down until 2pm tomorrow (Tuesday). I'll send further updates if anything changes.
-Dan //Vraj Mehalana 10:58, 12 September 2024 (PDT)
MLA150: UP
Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement. // Demis D. John 18:14, 11 September 2024 (PDT)
Stepper #3 (ASML DUV) - Down, update
The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures. ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair. // Demis D. John 18:14, 11 September 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
YES is available
The error has been cleared and I ran a shorter 5 minute recipe with no warning/error.
This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches.
// Vraj Mehalana 14:16, 18 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)