ICP Etching Recipes

From UCSB Nanofab Wiki

Revision as of 13:32, 17 August 2012 by Zwarburg (talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

Back to Dry Etching Recipes.

ICP Etch 1 (Panasonic E626I)

ICP Etch 2 (Panasonic E640)

ICP-Etch (Unaxis VLR)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=ICP_Etching_Recipes&oldid=1985"

Recipes