Lithography Recipes

Lift-Off Techniques

• Description/Tutorial
• Bi-Layer Process with PMGI Underlayer and Contact Aligner

Chemical Datasheets

To Do: Ask Brian where these should go...

Positive Photoresists

• AZP4000 (AZ4110, AZ4210, AZ4330)
• OCG825
• SPR220 (SPR220-2, SPR220-7)
• SPR950-0.8
• SPR955CM (SPR955CM-0.9, SPR955CM-1.8)

Negative Photoresists

• AZ5214
• AZnLOF5510
• AZnLOF2020

Underlayers

• PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)
• Shipley LOL2000

E-beam resists

• PMMA (PMMA, P(MMA-MAA) copolymer)
• maN 2403

Nanoimprinting

• NX1020
• MRI-7020

Contrast Enhancement Materials

• CEM365iS

Anti-Reflection Coatings

• XHRiC

Developers

• AZ400K (AZ400K, AZ400K1:4)
• AZ300MIF

Photoresist Removers

• 1165
• AZ300T
• PRX-127

Recipes

• R = Recipe is available. Clicking this link will take you to the recipe.
• A = Material is available for use, but no recipes are provided.

Lithography Recipes
	Contact Aligners		Steppers			Flood Expose	E-Beam Lithography
Positive Resists	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
AZ4110	R1	R1
AZ4210	R1	R1
AZ4330RS	R1	R1
OCG 825-35CS
SPR 950-0.8
SPR 955 CM-0.9
SPR 955 CM-1.8
SPR 220-3.0	R1	R1
SPR 220-7.0	R1	R1
THMR-IP3600 HP D
UV6-0.7
Negative Resists	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
AZ5214-EIR	R1	R1
AZnLOF 2020	R1	R1
AZnLOF 2035
AZnLOF 2070
AZnLOF P5510
UVN30-0.5
SU-8 2015
Underlayers	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
PMGI SF-11
PMGI SF-15
LOL 2000
XHRIC-11 (BARC)
AR-2 (BARC)
DS-K 101-307 (BARC)
Overlayers	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
CEM-365 IS
E-Beam Resists	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
??????
???????
Nanoimprint Resists	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)
MR-I 7020
Nanonex NX-1020
	SUSS MJB-3	SUSS MA-6	Stepper 1 (GCA 6300)	Stepper 2 (AutoStep 200)	Stepper 3 (ASML DUV)	MLA150 (Heidelberg)