Sputter 5 (AJA ATC 2200-V)

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Sputter 5 (AJA ATC 2200-V)

Tool Type	Vacuum Deposition
Location	Bay 3
Supervisor	Mike Silva
Supervisor Phone	(805) 893-3096
Supervisor E-Mail	silva@ece.ucsb.edu

Description	?
Manufacturer	Kurt J Lesker
Vacuum Deposition Recipes

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