RIE Etching Recipes

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Back to Dry Etching Recipes.

RIE 1 (Custom)

RIE 2 (MRC)

RIE 3 (MRC)

RIE 5 (PlasmaTherm)

GaN Etching (RIE#5)

GaN Etch Recipe

Si Deep RIE (PlasmaTherm/Bosch Etch)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=RIE_Etching_Recipes&oldid=3011"

Recipes