Wet Etching Recipes
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Compound Semiconductor Etching
| Material | Etchant | Rate (nm/min) | Anisotropy | Selective to | Selectivity | Ref. | Notes | Confirmed by | Header text |
|---|---|---|---|---|---|---|---|---|---|
| InP | Example | Example | Example | Example | Example | Example | Example | Example | Example |
| GaAs | Example | Example | Example | Example | Example | Example | Example | Example | Example |
| GaN | Example | Example | Example | Example | Example | Example | Example | Example | Example |