Sputter 5 (AJA ATC 2200-V)
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Sputter 5 (AJA ATC 2200-V)
Tool Type
Vacuum Deposition
Location
Bay 3
Supervisor
Mike Silva
Supervisor Phone
(805) 893-3096
Supervisor E-Mail
silva@ece.ucsb.edu
Description
?
Manufacturer
Kurt J Lesker
Vacuum Deposition Recipes
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