Difference between revisions of "Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe."

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(Gold surface darkened after O2/N2 ashing recipe treatment, XPS data showed that Au can oxidize in the high oxidization condition)
(No difference)

Revision as of 16:14, 9 June 2023