Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.

From UCSB Nanofab Wiki
Revision as of 16:22, 9 June 2023 by Ffoong (talk | contribs)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
In high oxidation environment, gold surface can darken or oxidized, as shown by the XPS data. Recipes with O2_N2 gas mixture often produce this effect.