Difference between revisions of "InP Etch Rate and Selectivity (InP/SiO2)"
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|Selectivity (InP/SiO2) |
|Selectivity (InP/SiO2) |
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+ | |10/4/2016 |
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− | | |
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+ | |InP#1613 |
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− | | |
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+ | |0.92 |
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− | | |
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− | | |
+ | |8.9 |
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|- |
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+ | |12/1/2016 |
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− | | |
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+ | |InP#1614 |
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− | | |
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+ | |0.96 |
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− | | |
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+ | |12.1 |
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− | | |
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+ | |- |
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+ | |12/15/2016 |
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+ | |InP#1615 |
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+ | |0.91 |
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+ | |9.3 |
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+ | |- |
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+ | |1/23/2017 |
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+ | |InP#1701 |
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+ | |0.93 |
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+ | |9.4 |
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+ | |- |
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+ | |2/7/2017 |
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+ | |InP#1702 |
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+ | |0.75 |
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+ | |7.7 |
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+ | |- |
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+ | |2/21/2017 |
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+ | |InP#1703 |
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+ | |0.91 |
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+ | |11.3 |
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+ | |- |
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+ | |3/21/2017 |
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+ | |InP#1704 |
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+ | |1.01 |
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+ | |11.3 |
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+ | |- |
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+ | |4/20/2017 |
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+ | |inP#1705 |
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+ | |0.88 |
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+ | |10.2 |
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+ | |- |
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+ | |5/4/2017 |
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+ | |InP#1706 |
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+ | |0.84 |
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+ | |11 |
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+ | |- |
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+ | |5/19/2017 |
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+ | |InP#1707 |
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+ | |0.82 |
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+ | |9.9 |
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+ | |- |
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+ | |7/6/2017 |
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+ | |InP#1708 |
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+ | |0.98 |
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+ | |12.1 |
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+ | |- |
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+ | |8/16/2017 |
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+ | |InP#1709 |
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+ | |0.76 |
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+ | |8 |
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+ | |- |
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+ | |8/28/2017 |
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+ | |InP#1710 |
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+ | |1 |
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+ | |11.7 |
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+ | |- |
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+ | |10/11/2017 |
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+ | |InP#1711 |
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+ | |1 |
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+ | |11 |
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+ | |- |
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+ | |10/23/2017 |
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+ | |InP#1712 |
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+ | |1.11 |
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+ | |13.1 |
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+ | |- |
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+ | |11/21/2017 |
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+ | |InP#1713 |
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+ | |1.04 |
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+ | |12.1 |
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+ | |- |
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+ | |12/7/2017 |
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+ | |InP#1714 |
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+ | |0.96 |
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+ | |10.4 |
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+ | |- |
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+ | |1/2/2018 |
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+ | |InP#1801 |
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+ | |1.44 |
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+ | |14.3 |
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+ | |- |
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+ | |3/1/2018 |
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+ | |InP#1802 |
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+ | |0.96 |
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+ | |9 |
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+ | |- |
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+ | |4/5/2018 |
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+ | |InP#1803 |
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+ | |1.05 |
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+ | |11.9 |
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+ | |- |
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+ | |4/10/2018 |
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+ | |InP#1804 |
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+ | |1.12 |
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+ | |12.8 |
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|- |
|- |
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|4/26/2018 |
|4/26/2018 |
Revision as of 11:05, 2 May 2018
1.4 mT, 125/800W, Cl2/H2/Ar flow-rate=6.3/12.7/2 sccm, chuck temperature=200 C, and etch time=90s (Prior to the etch, do O2 plasma chamber clean for 15 minutes, then, chamber coating with the same recipe and a quarter dummy InP on carrier for 15 minutes. | |||
Date | Sample# | InP Etch Rate (mm/min) | Selectivity (InP/SiO2) |
10/4/2016 | InP#1613 | 0.92 | 8.9 |
12/1/2016 | InP#1614 | 0.96 | 12.1 |
12/15/2016 | InP#1615 | 0.91 | 9.3 |
1/23/2017 | InP#1701 | 0.93 | 9.4 |
2/7/2017 | InP#1702 | 0.75 | 7.7 |
2/21/2017 | InP#1703 | 0.91 | 11.3 |
3/21/2017 | InP#1704 | 1.01 | 11.3 |
4/20/2017 | inP#1705 | 0.88 | 10.2 |
5/4/2017 | InP#1706 | 0.84 | 11 |
5/19/2017 | InP#1707 | 0.82 | 9.9 |
7/6/2017 | InP#1708 | 0.98 | 12.1 |
8/16/2017 | InP#1709 | 0.76 | 8 |
8/28/2017 | InP#1710 | 1 | 11.7 |
10/11/2017 | InP#1711 | 1 | 11 |
10/23/2017 | InP#1712 | 1.11 | 13.1 |
11/21/2017 | InP#1713 | 1.04 | 12.1 |
12/7/2017 | InP#1714 | 0.96 | 10.4 |
1/2/2018 | InP#1801 | 1.44 | 14.3 |
3/1/2018 | InP#1802 | 0.96 | 9 |
4/5/2018 | InP#1803 | 1.05 | 11.9 |
4/10/2018 | InP#1804 | 1.12 | 12.8 |
4/26/2018 | InP#1805 | 1.29 | 13.6 |