Difference between revisions of "Lithography Recipes"
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==Chemical Datasheets== | ==Chemical Datasheets== | ||
| − | *{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}} | + | {{todo|Ask Brian where these should go...}} |
| + | ;Positive Photoresists | ||
| + | *{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}} | ||
| + | *{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}} | ||
| + | *{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-2, SPR220-7)}} | ||
| + | *{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}} | ||
| + | *{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}} | ||
| + | |||
==Recipes== | ==Recipes== | ||
{{Recipe Table Explanation}} | {{Recipe Table Explanation}} | ||
Revision as of 16:56, 8 November 2012
Lift-Off Techniques
Chemical Datasheets
| To Do: Ask Brian where these should go... |
- Positive Photoresists
- AZP4000 (AZ4110, AZ4210, AZ4330)
- OCG825
- SPR220 (SPR220-2, SPR220-7)
- SPR950-0.8
- SPR955CM (SPR955CM-0.9, SPR955CM-1.8)
Recipes
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.