Difference between revisions of "Lithography Recipes"
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− | | bgcolor="#D0E7FF" align="center" | AR-2 (BARC) |
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+ | | bgcolor="#D0E7FF" align="center" | XHRIC-11 (BARC) |
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− | + | | bgcolor="#D0E7FF" align="center" | AR-2 (BARC) |
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− | + | | bgcolor="#D0E7FF" align="center" | DS-K 101-307 (BARC) |
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− | ! bgcolor="#D0E7FF" align="center" | |
+ | ! bgcolor="#D0E7FF" align="center" | '''Overlayers''' |
+ | {{LithRecipe Table}} |
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− | + | | bgcolor="#D0E7FF" align="center" | CEM-365 IS |
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− | ! bgcolor="#D0E7FF" align="center" | |
+ | ! bgcolor="#D0E7FF" align="center" | '''E-Beam Resists''' |
+ | {{LithRecipe Table}} |
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+ | |- bgcolor="EEFFFF" |
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+ | | bgcolor="#D0E7FF" align="center" | ?????? |
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− | + | | bgcolor="#D0E7FF" align="center" | ??????? |
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− | ! bgcolor="#D0E7FF" align="center" | |
+ | ! bgcolor="#D0E7FF" align="center" | '''Nanoimprint Resists''' |
+ | {{LithRecipe Table}} |
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+ | | bgcolor="#D0E7FF" align="center" | MR-I 7020 |
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− | + | | bgcolor="#D0E7FF" align="center" | Nanonex NX-1020 |
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