Difference between revisions of "Template:Announcements"
| Line 18: | Line 18: | ||
===== ALD Metal Dep ===== | ===== ALD Metal Dep ===== | ||
| − | The | + | The replacement turbo pump has arrived. We will finish the turbo installation Thursday February 14th. |
| − | [[User:Silva|Silva]] 21: | + | [[User:Silva|Silva]] 21:38, 13 February 2019 (PST) |
===== E-Beam#1 ===== | ===== E-Beam#1 ===== | ||
Revision as of 22:38, 13 February 2019
Equipment Status
Suss Bonder
Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. Silva 21:36, 13 February 2019 (PST)
KLA Tencor Surfscan
The system is down. The vendor has located a replacement PCB. Once the board is secured, the vendor will schedule a visit and finish the system repairs. Silva 21:51, 11 February 2019 (PST)
ALD Metal Dep
The replacement turbo pump has arrived. We will finish the turbo installation Thursday February 14th. Silva 21:38, 13 February 2019 (PST)
E-Beam#1
The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. Silva 21:45, 11 February 2019 (PST)
Vapor HF Etch
The system is down. The HF bottle is empty. The bottle will be replaced Wednesday February 13th. Silva 21:45, 11 February 2019 (PST)