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Revision as of 21:38, 13 February 2019 by Silva (talk | contribs)
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Equipment Status

Suss Bonder

Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. Silva 21:36, 13 February 2019 (PST)

KLA Tencor Surfscan

The system is down. The vendor has located a replacement PCB. Once the board is secured, the vendor will schedule a visit and finish the system repairs. Silva 21:51, 11 February 2019 (PST)

ALD Metal Dep

The replacement turbo pump has arrived. We will finish the turbo installation Thursday February 14th. Silva 21:38, 13 February 2019 (PST)


The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. Silva 21:45, 11 February 2019 (PST)

Vapor HF Etch

The system is down. The HF bottle is empty. The bottle will be replaced Wednesday February 13th. Silva 21:45, 11 February 2019 (PST)