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Revision as of 15:00, 17 February 2019 by Silva (talk | contribs)
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Equipment Status

Suss Bonder

Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)

KLA Tencor Surfscan

The system is down. The vendor has located a replacement PCB. Once the board is secured, the vendor will schedule a visit and finish the system repairs. // Silva 21:51, 11 February 2019 (PST)


The system is down. The E-Beam#1 power supply and control upgrade started today. We hope to complete the process within 10 business days. We will keep you posted as progress is made. // Silva 21:45, 11 February 2019 (PST)

Atomic Layer Deposition Dielectric Chamber

The chamber is down. There is a metal carrier lost in the process chamber. The issue will be addressed on Tuesday. Silva 14:00, 17 February 2019 (PST)

ASML DUV: PM March 12 to 15th

ASML will be performing their periodic maintenance on the DUV stepper from Tuesday March 12th through Friday March 15th. Please schedule your work accordingly. // John d 11:02, 15 February 2019 (PST)