Tube Furnace AlGaAs Oxidation (Lindberg)

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Tube Furnace AlGaAs Oxidation (Lindberg)
Location Bay 4
Tool Type Thermal Processing
Manufacturer ?
Description ?

Primary Supervisor Tony Bosch
(805) 893-3486

Secondary Supervisor

Aidan Hopkins

Recipes N/A


The Lindberg Furnace is designed for thermal oxidation of small piece parts (less than ~2" wide), under atmospheric pressure water vapor, at temperatures around 400°C. It is commonly used for VCSEL Current Aperture oxidation, via the selective oxidation of AlGaAs layers with high Aluminum content (>95%).


Please ask staff for methods of performing your oxidation using this tool.


Please ask staff or frequent users of the tool, for recipes and oxidation rates. Recipes are highly dependent on your epitaxy and epitaxial structure, and the specifics of the oxidation you are trying to perform.