Thermal Processing Recipes: Revision history

24 October 2024

• curprev 22:0122:01, 24 October 2024‎ John d talk contribs‎ 6,639 bytes −21‎ moved calculation times to "thermal ox" recipes, renamed "thermal ox recipes" to just "Ox recipes (tystar 8300)" Tag: Visual edit
• curprev 21:5821:58, 24 October 2024‎ John d talk contribs‎ 6,660 bytes +1,506‎ →‎Thermal Oxidation Recipes: process limits, recipes paosted from tool page Tag: Visual edit

30 January 2024

• curprev 23:2423:24, 30 January 2024‎ John d talk contribs‎ 5,154 bytes +814‎ →‎Tystar 8300: added wafer cleaning Tag: Visual edit

8 July 2022

• curprev 18:0918:09, 8 July 2022‎ John d talk contribs‎ 4,340 bytes +148‎ →‎Thermal Oxidation of Silicon - Calculating Oxidation Times: link to BYU ox calc Tag: Visual edit

20 April 2022

• curprev 06:1406:14, 20 April 2022‎ John d talk contribs‎ 4,192 bytes +174‎ →‎Bonding with Intermediate layer: link to Logitech recipes page Tag: Visual edit

2 February 2021

• curprev 01:1101:11, 2 February 2021‎ John d talk contribs‎ m 4,018 bytes +64‎ →‎Tystar 8300 Tag: Visual edit

26 July 2020

• curprev 20:3620:36, 26 July 2020‎ John d talk contribs‎ m 3,954 bytes +29‎ link to new goniometer page Tag: Visual edit

31 May 2019

• curprev 06:0406:04, 31 May 2019‎ John d talk contribs‎ m 3,925 bytes +14‎ More accurate description of how partial pressure derived Tag: Visual edit
• curprev 06:0006:00, 31 May 2019‎ John d talk contribs‎ m 3,911 bytes +93‎ →‎Simulation Parameters: clarified partial pressure is from curve fitting Tag: Visual edit

28 May 2019

• curprev 21:0821:08, 28 May 2019‎ John d talk contribs‎ m 3,818 bytes +114‎ linked to tool pages, minor updates, added HeraTherm for wafer bonding Tag: Visual edit
• curprev 19:3019:30, 28 May 2019‎ John d talk contribs‎ 3,704 bytes +87‎ anned RTP Solaris section Tag: Visual edit: Switched

15 October 2018

• curprev 21:5221:52, 15 October 2018‎ John d talk contribs‎ 3,617 bytes +2,102‎ Updated thermal ox Recipe names, added Logitech Bonder, Finetech Bonder, Tystar AlGaAs, Lindberg AlGaAs basic info. Tag: Visual edit

9 April 2018

• curprev 19:2019:20, 9 April 2018‎ John d talk contribs‎ m 1,515 bytes 0‎ →‎1050°C Dry Oxidation: correction to pressures Tag: Visual edit
• curprev 19:1919:19, 9 April 2018‎ John d talk contribs‎ m 1,515 bytes −8‎ →‎1050°C Wet Oxidation: image adjust Tag: Visual edit
• curprev 19:1719:17, 9 April 2018‎ John d talk contribs‎ 1,523 bytes +583‎ →‎Thermal Oxidation of Silicon: added simulation/data for Wet1050 and Dry1050 Tag: Visual edit: Switched

16 November 2017

• curprev 06:5606:56, 16 November 2017‎ John d talk contribs‎ m 940 bytes +4‎ minor grammar Tag: Visual edit
• curprev 06:5606:56, 16 November 2017‎ John d talk contribs‎ 936 bytes +855‎ added some text and links to tools. Tag: Visual edit

18 August 2014

• curprev 00:1300:13, 18 August 2014‎ Jcrode talk contribs‎ 81 bytes +24‎ No edit summary

10 July 2012

• curprev 14:5414:54, 10 July 2012‎ Zwarburg talk contribs‎ 57 bytes +41‎ No edit summary

2 July 2012

• curprev 18:4218:42, 2 July 2012‎ Zwarburg talk contribs‎ 16 bytes +16‎ Created page with ".... =Recipes="