MLA150 - Troubleshooting: Revision history

22 October 2024

• curprev 23:3223:32, 22 October 2024‎ John d talk contribs‎ m 18,998 bytes +46‎ →‎Misalignment Tag: Visual edit
• curprev 23:3123:31, 22 October 2024‎ John d talk contribs‎ 18,952 bytes +46‎ →‎Aligning to a quarter-wafer/irregular piece: autor Tag: Visual edit
• curprev 23:2923:29, 22 October 2024‎ John d talk contribs‎ 18,906 bytes +100‎ →‎Misalignment: added typical value for scaling Tag: Visual edit
• curprev 23:2623:26, 22 October 2024‎ John d talk contribs‎ 18,806 bytes +3,314‎ addded misalignment section Tag: Visual edit

18 October 2024

• curprev 17:0817:08, 18 October 2024‎ Sawyer l talk contribs‎ 15,492 bytes +18‎ Piezo range values Tag: Visual edit

5 June 2024

• curprev 17:5917:59, 5 June 2024‎ John d talk contribs‎ 15,474 bytes +3‎ →‎Solutions for small substrates: --> sols for ALL substrate types Tag: Visual edit

20 March 2024

• curprev 22:0522:05, 20 March 2024‎ John d talk contribs‎ 15,471 bytes +149‎ →‎Causes: added OAF driving off wafer Tag: Visual edit

3 February 2024

• curprev 05:0605:06, 3 February 2024‎ John d talk contribs‎ 15,322 bytes +16‎ →‎Greyscale Lithography Limitations: updated link Tag: Visual edit
• curprev 04:4104:41, 3 February 2024‎ John d talk contribs‎ m 15,306 bytes −160‎ minor additons/grammar Tag: Visual edit

2 November 2023

• curprev 22:4722:47, 2 November 2023‎ John d talk contribs‎ m 15,466 bytes +65‎ →‎Stitching Tag: Visual edit
• curprev 22:4722:47, 2 November 2023‎ John d talk contribs‎ 15,401 bytes +321‎ →‎Stitching: mention fix by overexposure + CD Bias Tag: Visual edit
• curprev 22:2822:28, 2 November 2023‎ John d talk contribs‎ m 15,080 bytes +1‎ →‎Stitching Tag: Visual edit
• curprev 22:2822:28, 2 November 2023‎ John d talk contribs‎ 15,079 bytes +234‎ →‎Stitching: added SEM of 400nm line/space with 50nm stitching bump Tag: Visual edit
• curprev 22:1922:19, 2 November 2023‎ John d talk contribs‎ 14,845 bytes +772‎ stitching secviton on y-oriented ridges Tag: Visual edit

31 October 2023

• curprev 23:1023:10, 31 October 2023‎ John d talk contribs‎ 14,073 bytes −1,748‎ →‎Greyscale Lithography Limitations: moved content to Greyscale design guidelines page and linked to that. Tag: Visual edit

9 August 2023

• curprev 16:5616:56, 9 August 2023‎ John d talk contribs‎ 15,821 bytes +183‎ →‎Greyscale Lithography Limitations: updated that X-Y alignment may work, just not rotation. Tag: Visual edit

30 July 2023

• curprev 21:3221:32, 30 July 2023‎ John d talk contribs‎ 15,638 bytes +1,820‎ Greyscale limitations Tag: Visual edit

22 July 2022

• curprev 13:1113:11, 22 July 2022‎ John d talk contribs‎ 13,818 bytes +118‎ →‎Solutions for small substrates: starting exp on uniform area. Tag: Visual edit

6 July 2022

• curprev 23:5823:58, 6 July 2022‎ John d talk contribs‎ 13,700 bytes +263‎ →‎Solution for 3-4 inch wafers: added CAD reduction by ≥10mm Tag: Visual edit

15 June 2022

• curprev 15:2615:26, 15 June 2022‎ John d talk contribs‎ 13,437 bytes +404‎ →‎Solutions for small substrates: added EBR techniques link Tag: Visual edit

28 January 2022

• curprev 04:4304:43, 28 January 2022‎ John d talk contribs‎ 13,033 bytes +356‎ →‎Solutions for small substrates: added THomas Messner's solution: disable Overview Camera before starting exposure Tag: Visual edit

14 January 2022

• curprev 04:4304:43, 14 January 2022‎ John d talk contribs‎ m 12,677 bytes +84‎ →‎Unexpected Behavior Tag: Visual edit
• curprev 04:4104:41, 14 January 2022‎ John d talk contribs‎ 12,593 bytes +271‎ →‎Out Of Focus Exposures: Boris’ solutionnadded Tag: Visual edit

21 December 2021

• curprev 23:0923:09, 21 December 2021‎ John d talk contribs‎ 12,322 bytes +36‎ →‎Out Of Focus Exposures: "features less than 100µm" Tag: Visual edit
• curprev 18:5218:52, 21 December 2021‎ John d talk contribs‎ m 12,286 bytes −5‎ →‎Out Of Focus Exposures Tag: Visual edit
• curprev 18:5218:52, 21 December 2021‎ John d talk contribs‎ 12,291 bytes +285‎ →‎Out Of Focus Exposures: inserted image of out-of-focus exposure Tag: Visual edit
• curprev 18:3918:39, 21 December 2021‎ John d talk contribs‎ m 12,006 bytes −3‎ fix bullets
• curprev 18:3818:38, 21 December 2021‎ John d talk contribs‎ m 12,009 bytes −2‎ →‎Unexpected Behavior Tag: Visual edit
• curprev 18:3418:34, 21 December 2021‎ John d talk contribs‎ 12,011 bytes −38‎ rearranged sections, increased heading level to 1 & 2 Tag: Visual edit
• curprev 18:0718:07, 21 December 2021‎ John d talk contribs‎ 12,049 bytes +62‎ No edit summary Tag: Visual edit

15 December 2021

• curprev 13:1013:10, 15 December 2021‎ John d talk contribs‎ 11,987 bytes +1,908‎ →‎Out Of Focus Exposures: Debugging section Tag: Visual edit

1 November 2021

• curprev 15:5815:58, 1 November 2021‎ John d talk contribs‎ 10,079 bytes +392‎ →‎Unexpected Behavior: moved to top. Added Reconverting CAD file. Tag: Visual edit

29 September 2021

• curprev 02:1902:19, 29 September 2021‎ John d talk contribs‎ m 9,687 bytes +15‎ →‎Aligning to a quarter-wafer Tag: Visual edit
• curprev 02:1802:18, 29 September 2021‎ John d talk contribs‎ 9,672 bytes +182‎ →‎Aligning to a quarter-wafer: inserted schematic Tag: Visual edit
• curprev 02:0102:01, 29 September 2021‎ John d talk contribs‎ 9,490 bytes +183‎ →‎Aligning to a quarter-wafer: minor description update Tag: Visual edit
• curprev 01:5701:57, 29 September 2021‎ John d talk contribs‎ 9,307 bytes +2,034‎ added ALigning to a Quarter Wafer Tag: Visual edit

3 August 2021

• curprev 19:1619:16, 3 August 2021‎ John d talk contribs‎ 7,273 bytes +263‎ →‎Known Bugs & Workarounds: Stage bot centered - note about Small / OV camera Tag: Visual edit

20 July 2021

• curprev 18:5818:58, 20 July 2021‎ John d talk contribs‎ 7,010 bytes +169‎ →‎Defocus: unable to enter ±25 full range: Added name of recent Resist tempalte "General-Focus" Tag: Visual edit

7 June 2021

• curprev 17:4117:41, 7 June 2021‎ John d talk contribs‎ m 6,841 bytes +47‎ →‎Workaround Tag: Visual edit
• curprev 17:4017:40, 7 June 2021‎ John d talk contribs‎ m 6,794 bytes +58‎ →‎Workaround: link to reboot prcedure
• curprev 17:3817:38, 7 June 2021‎ John d talk contribs‎ 6,736 bytes +1,997‎ Out of Focus exposures - problem + solutions Tag: Visual edit

19 March 2021

• curprev 22:0022:00, 19 March 2021‎ John d talk contribs‎ 4,739 bytes +204‎ →‎Nanofiles folder not showing up on SFTP: link to FAQ on Nanofiles FTP Tag: Visual edit
• curprev 21:5921:59, 19 March 2021‎ John d talk contribs‎ 4,535 bytes +596‎ →‎Known Bugs & Workarounds: added "Nanofiles folder not showing up" Tag: Visual edit
• curprev 21:5521:55, 19 March 2021‎ John d talk contribs‎ 3,939 bytes +331‎ →‎Defocus: unable to enter ±25 full range: updated Tag: Visual edit

9 February 2021

• curprev 11:5011:50, 9 February 2021‎ John d talk contribs‎ m 3,608 bytes +2‎ →‎Defocus: unable to enter ±25 full range: typo Tag: Visual edit

5 February 2021

• curprev 19:0519:05, 5 February 2021‎ John d talk contribs‎ 3,606 bytes +422‎ added "Stage not centered" Tag: Visual edit

23 January 2021

• curprev 21:5921:59, 23 January 2021‎ John d talk contribs‎ 3,184 bytes +443‎ →‎Known Bugs & Workarounds: added Exposure Log. Tag: Visual edit

21 January 2021

• curprev 20:4620:46, 21 January 2021‎ John d talk contribs‎ 2,741 bytes +945‎ added Focal Depth motor (contact staff) and Covert not launching Tag: Visual edit
• curprev 20:3220:32, 21 January 2021‎ John d talk contribs‎ 1,796 bytes +9‎ moved TOC below summary
• curprev 20:3120:31, 21 January 2021‎ John d talk contribs‎ 1,787 bytes +1,787‎ added Defocus bug and Compuer Restart. Tag: Visual edit