ICP Etching Recipes: Revision history

30 March 2020

• curprev 22:4922:49, 30 March 2020‎ John d talk contribs‎ 10,679 bytes +12‎ →‎Al Etch (Panasonic 1) Tag: Visual edit
• curprev 22:4822:48, 30 March 2020‎ John d talk contribs‎ 10,667 bytes +6‎ →‎Al Etch (Panasonic 2)

28 January 2020

• curprev 18:3818:38, 28 January 2020‎ John d talk contribs‎ m 10,661 bytes +2‎ →‎ARC Etching: DUV-42P or AR6: formatting Tag: Visual edit
• curprev 18:3618:36, 28 January 2020‎ John d talk contribs‎ m 10,659 bytes +96‎ →‎Photoresist and ARC etching: added names for contact for etch rates Tag: Visual edit

17 January 2020

• curprev 16:0316:03, 17 January 2020‎ John d talk contribs‎ 10,563 bytes +112‎ →‎ICP Etch 1 (Panasonic E626I): added section headings Tag: Visual edit
• curprev 16:0216:02, 17 January 2020‎ John d talk contribs‎ 10,451 bytes +166‎ →‎SiO2 Etching (Panasonic 2): added section headings Tag: Visual edit
• curprev 15:5915:59, 17 January 2020‎ John d talk contribs‎ 10,285 bytes +46‎ →‎SiO2 Etching (Panasonic 1): added historical data section Tag: Visual edit

4 October 2019

• curprev 19:2319:23, 4 October 2019‎ John d talk contribs‎ 10,239 bytes +1,487‎ →‎Ru (Ruthenium) Etch (Panasonic 2): Ru etch PDF Tag: Visual edit

22 March 2019

• curprev 18:5218:52, 22 March 2019‎ John d talk contribs‎ 8,752 bytes +87‎ →‎ICP Etch 2 (Panasonic E640): added placeholder for Ru etch Tag: Visual edit

19 March 2019

• curprev 15:0515:05, 19 March 2019‎ John d talk contribs‎ m 8,665 bytes +14‎ →‎Si Etching: minor typo Tag: Visual edit
• curprev 02:1802:18, 19 March 2019‎ Mitchell talk contribs‎ 8,651 bytes +16‎ →‎Si Etching Tag: Visual edit
• curprev 02:1702:17, 19 March 2019‎ Mitchell talk contribs‎ 8,635 bytes −13‎ Added Ta etch recipe
• curprev 02:1602:16, 19 March 2019‎ Mitchell talk contribs‎ 8,648 bytes −20‎ →‎Ta Etch (Panasonic 1) Tag: Visual edit
• curprev 02:1402:14, 19 March 2019‎ Mitchell talk contribs‎ 8,668 bytes +113‎ Adding Ta etch
• curprev 02:0302:03, 19 March 2019‎ Mitchell talk contribs‎ 8,555 bytes +25‎ Added SiVertHF pdf file and link Tag: Visual edit: Switched
• curprev 01:4601:46, 19 March 2019‎ Mitchell talk contribs‎ 8,530 bytes +2‎ No edit summary Tag: Visual edit
• curprev 01:4201:42, 19 March 2019‎ Mitchell talk contribs‎ 8,528 bytes +79‎ →‎Si Single-Step Etching Tag: Visual edit

30 January 2019

• curprev 07:1007:10, 30 January 2019‎ John d talk contribs‎ m 8,449 bytes +8‎ →‎Photoresist and ARC etching: ARC --> BARC Tag: Visual edit

29 January 2019

• curprev 19:1719:17, 29 January 2019‎ Ningcao talk contribs‎ 8,441 bytes −5‎ →‎SiO2 Etching (Panasonic 1) Tag: Visual edit
• curprev 19:1619:16, 29 January 2019‎ Ningcao talk contribs‎ 8,446 bytes +5‎ →‎SiO2 Etching (Panasonic 1) Tag: Visual edit
• curprev 19:0619:06, 29 January 2019‎ Ningcao talk contribs‎ 8,441 bytes +45‎ →‎SiO2 Etching (Panasonic 1) Tag: Visual edit
• curprev 18:1118:11, 29 January 2019‎ Ningcao talk contribs‎ 8,396 bytes +4‎ →‎SiO2 Etching (Panasonic 1) Tag: Visual edit
• curprev 18:0618:06, 29 January 2019‎ Ningcao talk contribs‎ 8,392 bytes +113‎ →‎SiO2 Etching (Panasonic 1) Tag: Visual edit
• curprev 17:4717:47, 29 January 2019‎ Ningcao talk contribs‎ 8,279 bytes −30‎ →‎ICP Etch 1 (Panasonic E626I) Tag: Visual edit
• curprev 17:4717:47, 29 January 2019‎ Ningcao talk contribs‎ 8,309 bytes +85‎ /* SiO2 Etching with ICP1 Tag: Visual edit

21 November 2018

• curprev 23:5923:59, 21 November 2018‎ John d talk contribs‎ m 8,224 bytes +2‎ →‎Photoresist and ARC Etching: corrected link Tag: Visual edit

9 October 2018

• curprev 15:2315:23, 9 October 2018‎ Ningcao talk contribs‎ 8,222 bytes +1‎ →‎SiO2 Etching (Panasonic 2) Tag: Visual edit
• curprev 15:1715:17, 9 October 2018‎ Ningcao talk contribs‎ 8,221 bytes +109‎ →‎SiO2 Etching (Panasonic 2): change the data title Tag: Visual edit

8 October 2018

• curprev 23:1523:15, 8 October 2018‎ Ningcao talk contribs‎ 8,112 bytes −83‎ →‎SiO2 Etching (Panasonic 1) Tag: Visual edit
• curprev 22:4522:45, 8 October 2018‎ Ningcao talk contribs‎ 8,195 bytes +45‎ →‎SiO2 Etching (Panasonic 2): add a title Tag: Visual edit
• curprev 22:4222:42, 8 October 2018‎ Ningcao talk contribs‎ 8,150 bytes +48‎ →‎SiO2 Etching (Panasonic 2): adding SiO2 etch test title Tag: Visual edit
• curprev 22:3622:36, 8 October 2018‎ Ningcao talk contribs‎ 8,102 bytes +4‎ →‎ICP Etch 1 (Panasonic E626I): add SiO2 test data Tag: Visual edit
• curprev 22:3222:32, 8 October 2018‎ Ningcao talk contribs‎ 8,098 bytes +79‎ →‎SiO2 Etching (Panasonic 1): adding test data Tag: Visual edit

29 September 2018

• curprev 01:0801:08, 29 September 2018‎ John d talk contribs‎ m 8,019 bytes +2‎ →‎Photoresist & ARC Etching: changed name to no ampersand, mathcing ICP2 title Tag: Visual edit
• curprev 01:0701:07, 29 September 2018‎ John d talk contribs‎ 8,017 bytes +281‎ →‎ICP Etch 1 (Panasonic E626I): linked to ICP#2 PR/ARC etching recipe Tag: Visual edit

28 August 2018

• curprev 21:5521:55, 28 August 2018‎ John d talk contribs‎ 7,736 bytes +51‎ →‎PlasmaTherm/SLR Fluorine Etcher: linked to proper/new tool page Tag: Visual edit
• curprev 21:5321:53, 28 August 2018‎ John d talk contribs‎ 7,685 bytes +180‎ added SLR Fluorine, moved SiDeepRIE to bottom
• curprev 21:3821:38, 28 August 2018‎ John d talk contribs‎ 7,505 bytes +440‎ →‎Si Deep RIE (PlasmaTherm/Bosch Etch): note that the tool does not exist in this configuration any more Tag: Visual edit: Switched

2 July 2018

• curprev 21:0321:03, 2 July 2018‎ Ningcao talk contribs‎ 7,065 bytes +1‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR)
• curprev 21:0221:02, 2 July 2018‎ Ningcao talk contribs‎ 7,064 bytes +45‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR)
• curprev 21:0121:01, 2 July 2018‎ Ningcao talk contribs‎ 7,019 bytes +82‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR)

29 June 2018

• curprev 22:3622:36, 29 June 2018‎ Ningcao talk contribs‎ 6,937 bytes −129‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
• curprev 22:3522:35, 29 June 2018‎ Ningcao talk contribs‎ 7,066 bytes −1‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
• curprev 22:3422:34, 29 June 2018‎ Ningcao talk contribs‎ 7,067 bytes −93‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
• curprev 22:3222:32, 29 June 2018‎ Ningcao talk contribs‎ 7,160 bytes −100‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
• curprev 22:3222:32, 29 June 2018‎ Ningcao talk contribs‎ 7,260 bytes −123‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit

26 June 2018

• curprev 23:4723:47, 26 June 2018‎ John d talk contribs‎ 7,383 bytes +106‎ →‎Ti Etch (Panasonic 1): link to elecrochem paper Tag: Visual edit

2 May 2018

• curprev 15:5715:57, 2 May 2018‎ Ningcao talk contribs‎ 7,277 bytes −46‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
• curprev 15:5515:55, 2 May 2018‎ Ningcao talk contribs‎ 7,323 bytes +46‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit
• curprev 15:4715:47, 2 May 2018‎ Ningcao talk contribs‎ 7,277 bytes +36‎ →‎InP-InGaAs-InAlAs Etch (Unaxis VLR) Tag: Visual edit