ICP Etching Recipes: Revision history

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curprev 20:0420:04, 17 May 2021‎ John d talk contribs‎ 13,996 bytes +526‎ →‎PlasmaTherm/SLR Fluorine Etcher: added BARC and PR etches Tag: Visual edit

curprev 16:3616:36, 16 April 2021‎ John d talk contribs‎ 13,470 bytes +84‎ →‎SiO2 Etching (Fluorine ICP Etcher): added ER and Sel for 50W & 200W bias Tag: Visual edit

curprev 23:1223:12, 4 February 2021‎ Ningcao talk contribs‎ 13,386 bytes +1‎ →‎SiO2 Etch Historical Data Tag: Visual edit
curprev 23:0723:07, 4 February 2021‎ Ningcao talk contribs‎ 13,385 bytes +1‎ →‎SiO2 Etch Historical Data

curprev 23:3923:39, 2 February 2021‎ Ningcao talk contribs‎ 13,033 bytes +52‎ →‎Historical Data (SiO2, Florine ICP Etcher) Tag: Visual edit
curprev 23:2623:26, 2 February 2021‎ Ningcao talk contribs‎ 12,981 bytes −1‎ →‎Historical Data (SiO2, Florine ICP Etcher)
curprev 23:2523:25, 2 February 2021‎ Ningcao talk contribs‎ 12,982 bytes +53‎ →‎Historical Data (SiO2, Florines ICP Etcher)
curprev 23:2223:22, 2 February 2021‎ Ningcao talk contribs‎ 12,929 bytes +49‎ →‎PlasmaTherm/SLR Fluorine Etcher

curprev 13:2413:24, 27 January 2021‎ John d talk contribs‎ 12,880 bytes +964‎ →‎High Rate Bosch Etch (DSEIII): Bsoch PR selectivity, tips to reduce black silicon, edge bead removal process link Tag: Visual edit

curprev 00:3200:32, 12 January 2021‎ John d talk contribs‎ m 11,916 bytes −46‎ →‎SiO2 Etching: wrote bias variations Tag: Visual edit

curprev 13:4513:45, 25 July 2020‎ John d talk contribs‎ m 11,962 bytes +60‎ →‎Recipe Variations: description of slanted etching doc Tag: Visual edit
curprev 05:1305:13, 25 July 2020‎ John d talk contribs‎ 11,902 bytes +25‎ →‎SiO2 Etching: added credit for Bill Mitchell Tag: Visual edit

curprev 17:2717:27, 24 July 2020‎ John d talk contribs‎ 11,877 bytes +205‎ →‎DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): added actual Recipe names from teh tool Tag: Visual edit
curprev 13:5613:56, 24 July 2020‎ John d talk contribs‎ m 11,672 bytes +27‎ →‎DSEIII_(PlasmaTherm/Deep_Silicon_Etcher) Tag: Visual edit
curprev 13:5513:55, 24 July 2020‎ John d talk contribs‎ 11,645 bytes +434‎ →‎High Rate Bosch Etch (DSEIII): added descriptions to the two recipes Tag: Visual edit

curprev 18:4218:42, 9 June 2020‎ John d talk contribs‎ 11,211 bytes +494‎ →‎SiO2 Etching: added Ning's Ru-masked SiO2 etch Tag: Visual edit

curprev 01:3701:37, 7 April 2020‎ Jcrode talk contribs‎ 10,717 bytes +35‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"
curprev 01:2501:25, 7 April 2020‎ Jcrode talk contribs‎ 10,682 bytes +3‎ Text replacement - "[http://wiki" to "[https://wiki"

curprev 22:4922:49, 30 March 2020‎ John d talk contribs‎ 10,679 bytes +12‎ →‎Al Etch (Panasonic 1) Tag: Visual edit
curprev 22:4822:48, 30 March 2020‎ John d talk contribs‎ 10,667 bytes +6‎ →‎Al Etch (Panasonic 2)

curprev 18:3818:38, 28 January 2020‎ John d talk contribs‎ m 10,661 bytes +2‎ →‎ARC Etching: DUV-42P or AR6: formatting Tag: Visual edit
curprev 18:3618:36, 28 January 2020‎ John d talk contribs‎ m 10,659 bytes +96‎ →‎Photoresist and ARC etching: added names for contact for etch rates Tag: Visual edit

curprev 16:0316:03, 17 January 2020‎ John d talk contribs‎ 10,563 bytes +112‎ →‎ICP Etch 1 (Panasonic E626I): added section headings Tag: Visual edit
curprev 16:0216:02, 17 January 2020‎ John d talk contribs‎ 10,451 bytes +166‎ →‎SiO2 Etching (Panasonic 2): added section headings Tag: Visual edit
curprev 15:5915:59, 17 January 2020‎ John d talk contribs‎ 10,285 bytes +46‎ →‎SiO2 Etching (Panasonic 1): added historical data section Tag: Visual edit

curprev 19:2319:23, 4 October 2019‎ John d talk contribs‎ 10,239 bytes +1,487‎ →‎Ru (Ruthenium) Etch (Panasonic 2): Ru etch PDF Tag: Visual edit

curprev 18:5218:52, 22 March 2019‎ John d talk contribs‎ 8,752 bytes +87‎ →‎ICP Etch 2 (Panasonic E640): added placeholder for Ru etch Tag: Visual edit

curprev 07:1007:10, 30 January 2019‎ John d talk contribs‎ m 8,449 bytes +8‎ →‎Photoresist and ARC etching: ARC --> BARC Tag: Visual edit

curprev 23:5923:59, 21 November 2018‎ John d talk contribs‎ m 8,224 bytes +2‎ →‎Photoresist and ARC Etching: corrected link Tag: Visual edit

curprev 15:2315:23, 9 October 2018‎ Ningcao talk contribs‎ 8,222 bytes +1‎ →‎SiO2 Etching (Panasonic 2) Tag: Visual edit

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