ICP Etching Recipes: Revision history

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curprev 00:1600:16, 3 December 2022‎ John d talk contribs‎ 22,045 bytes +745‎ →‎Si Etching (Fluorine ICP Etcher): added Al2O3/SiO2 masking procedure Tag: Visual edit

curprev 20:2520:25, 11 November 2022‎ John d talk contribs‎ m 21,300 bytes +37‎ →‎Through Silicon Via etch (DSEiii): author credit Tag: Visual edit
curprev 20:2320:23, 11 November 2022‎ John d talk contribs‎ 21,263 bytes +3,783‎ →‎DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): added procedure for through-wafer etch Tag: Visual edit

curprev 15:3515:35, 29 October 2022‎ John d talk contribs‎ 17,480 bytes +85‎ →‎Photoresist and ARC etching (Panasonic 2): link to DUV42P and added thickness Tag: Visual edit

curprev 20:1320:13, 4 October 2022‎ John d talk contribs‎ 17,395 bytes +252‎ →‎Edge-Bead Removal: link to manual RP removal Tag: Visual edit

curprev 23:3323:33, 29 September 2022‎ John d talk contribs‎ 17,143 bytes +113‎ →‎ICP-Etch (Unaxis VLR): added (empty) section for Unaxis Cleaning Recipes Tag: Visual edit

curprev 18:0518:05, 9 September 2022‎ John d talk contribs‎ 17,030 bytes +26‎ →‎Al2O3 Etching (Panasonic 2): convert to nm/min ER Tag: Visual edit

curprev 18:5018:50, 19 July 2022‎ John d talk contribs‎ 17,004 bytes +1‎ →‎SiO2 Etching (Fluorine ICP Etcher): added PR selectivity Tag: Visual edit

curprev 23:2323:23, 9 July 2022‎ John d talk contribs‎ 17,003 bytes +43‎ →‎SiO2 Etching (Fluorine ICP Etcher): mentioned PR mask Tag: Visual edit

curprev 14:5014:50, 23 June 2022‎ John d talk contribs‎ 16,960 bytes +69‎ →‎Oxford ICP Etcher (PlasmaPro 100 Cobra): updated recipes, linked to SOP for travelers for each recipe Tag: Visual edit

curprev 01:5501:55, 16 June 2022‎ John d talk contribs‎ 16,891 bytes +134‎ →‎UV6-0.8 Etching: update PR strip headers to be more general, and update FL-ICP Pr strip section. Tag: Visual edit

curprev 00:2700:27, 11 May 2022‎ John d talk contribs‎ m 16,757 bytes −27‎ Renaming Process Control Data Tag: Visual edit
curprev 00:2500:25, 11 May 2022‎ John d talk contribs‎ m 16,784 bytes −148‎ renamed "historical data" to "process control" data Tag: Visual edit

curprev 20:0620:06, 15 April 2022‎ John d talk contribs‎ 16,932 bytes +9‎ →‎ICP-Etch (Unaxis VLR): link to Process Control Data Tag: Visual edit
curprev 20:0220:02, 15 April 2022‎ John d talk contribs‎ 16,923 bytes +233‎ added Process Control Data sections for each tool Tag: Visual edit

curprev 00:4300:43, 13 April 2022‎ John d talk contribs‎ m 16,690 bytes +1‎ →‎Oxford ICP Etcher (PlasmaPro 100 Cobra) Tag: Visual edit
curprev 00:4000:40, 13 April 2022‎ John d talk contribs‎ 16,689 bytes +275‎ →‎Oxford ICP Etcher (PlasmaPro 100 Cobra): link to GaN etch recipes Tag: Visual edit

curprev 15:5915:59, 26 February 2022‎ John d talk contribs‎ m 16,414 bytes +27‎ →‎Old Deleted Recipes: changed "don" to "supervisor" Tag: Visual edit

curprev 20:2320:23, 11 February 2022‎ John d talk contribs‎ 16,387 bytes −36‎ →‎ICP Etch 2 (Panasonic E640): updated ICP1 and ICP2 with Process Control sections for SiO2 etch tests. Tag: Visual edit
curprev 20:1320:13, 11 February 2022‎ John d talk contribs‎ 16,423 bytes +22‎ →‎SiO2 Etch Historical Data: reanmed to include tool name Tag: Visual edit
curprev 20:1220:12, 11 February 2022‎ John d talk contribs‎ 16,401 bytes −37‎ →‎SiO2 Etching (Fluorine ICP Etcher): consolidated FL-ICP Prcoess Control data Tag: Visual edit
curprev 19:2819:28, 11 February 2022‎ John d talk contribs‎ 16,438 bytes +1‎ →‎PlasmaTherm/SLR Fluorine Etcher: moved historical data to top Tag: Visual edit

curprev 06:1206:12, 14 January 2022‎ John d talk contribs‎ 16,437 bytes +133‎ →‎Oxford ICP Etcher (PlasmaPro 100 Cobra): GaN ALE section started Tag: Visual edit
curprev 06:1106:11, 14 January 2022‎ John d talk contribs‎ 16,304 bytes +238‎ →‎Oxford ICP Etcher (PlasmaPro 100 Cobra): NOTE: Rates in these 2021-09 characterizations are lower than current due to a software timing bug, fixed in 2022-01 Tag: Visual edit
curprev 06:0706:07, 14 January 2022‎ John d talk contribs‎ 16,066 bytes +55‎ →‎Process Control Data (Oxford ICP Etcher) Tag: Visual edit

curprev 21:2021:20, 13 January 2022‎ John d talk contribs‎ 16,011 bytes +3‎ →‎Historical Data (Oxford ICP Etcher): changed to "process control data" Tag: Visual edit
curprev 21:1821:18, 13 January 2022‎ John d talk contribs‎ 16,008 bytes +208‎ →‎Oxford ICP Etcher (PlasmaPro 100 Cobra): link to Historical Data Tag: Visual edit

curprev 18:1118:11, 4 January 2022‎ John d talk contribs‎ 15,800 bytes −158‎ →‎Historical Data (SiO2 Etch, Panasonic 2): removed 2nd data table Tag: Visual edit

curprev 16:2116:21, 11 December 2021‎ John d talk contribs‎ m 15,958 bytes +115‎ →‎Si Deep RIE (PlasmaTherm/Bosch Etch): linnks to new DSE & FL_ICP recipes Tag: Visual edit
curprev 16:2016:20, 11 December 2021‎ John d talk contribs‎ 15,843 bytes +331‎ →‎Oxford ICP Etcher (PlasmaPro 100 Cobra): links for GaAs, GaSb Tag: Visual edit

curprev 22:2422:24, 9 November 2021‎ Ningcao talk contribs‎ 15,512 bytes +35‎ add a SiO2 Etch link using Flourine ICP Tag: Visual edit

curprev 21:0121:01, 8 October 2021‎ John d talk contribs‎ 15,477 bytes +293‎ →‎InP Ridge Etch (Oxford ICP Etcher): links to PDFs of etch characterizations Tag: Visual edit

curprev 19:1319:13, 29 September 2021‎ John d talk contribs‎ m 15,184 bytes +22‎ →‎SiO2 Etching (Fluorine ICP Etcher): listed etch gasses used Tag: Visual edit

curprev 00:0200:02, 28 September 2021‎ John d talk contribs‎ 15,162 bytes +60‎ →‎Photoresist & ARC (Fluorine ICP Etcher): subheadings for BARC and PR strip Tag: Visual edit

curprev 19:5219:52, 4 September 2021‎ Jcrode talk contribs‎ 15,102 bytes −3‎ Text replacement - "/wiki/index.php" to "/w/index.php"
curprev 19:4719:47, 4 September 2021‎ Jcrode talk contribs‎ 15,105 bytes +6‎ Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

curprev 21:1021:10, 3 September 2021‎ John d talk contribs‎ 15,099 bytes +705‎ Added Oxfrod ICP section and placeholder recipes Tag: Visual edit

curprev 17:5317:53, 14 July 2021‎ John d talk contribs‎ 14,394 bytes +65‎ →‎PlasmaTherm/SLR Fluorine Etcher: section header for Cleaning Recipes / TBA Tag: Visual edit

curprev 20:4320:43, 12 July 2021‎ John d talk contribs‎ m 14,329 bytes +16‎ →‎Photoresist and ARC Etching (Panasonic 1): fixed URL link Tag: Visual edit

curprev 16:5916:59, 14 June 2021‎ John d talk contribs‎ 14,313 bytes +28‎ →‎ICP Etch 1 (Panasonic E626I): corrected header titles to include "(Pan 1/2" Tag: Visual edit

curprev 15:0115:01, 27 May 2021‎ John d talk contribs‎ 14,285 bytes +253‎ →‎SiO2 Etching (Fluorine ICP Etcher): link to publication Tag: Visual edit
curprev 14:5814:58, 27 May 2021‎ John d talk contribs‎ 14,032 bytes +36‎ →‎Ru (Ruthenium) Etch (Panasonic 2): link to pub Tag: Visual edit

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