ASML Stepper 3 Error Recovery, Troubleshooting and Calibration: Revision history

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curprev 03:3003:30, 23 October 2024‎ John d talk contribs‎ 349 bytes −8,307‎ deleted info, instead link to google docs (access restricted) Tags: Replaced Visual edit

curprev 17:3617:36, 15 September 2023‎ John d talk contribs‎ 8,656 bytes +31‎ →‎Error Logs: made name more descriptive Tag: Visual edit

curprev 15:1415:14, 12 September 2023‎ John d talk contribs‎ m 7,171 bytes +45‎ →‎Important Warnings Tag: Visual edit

curprev 12:2912:29, 28 June 2023‎ John d talk contribs‎ m 7,126 bytes +1‎ →‎Exposing with corrected Focus Offset via IQC Tag: Visual edit
curprev 11:2111:21, 28 June 2023‎ John d talk contribs‎ 7,125 bytes +220‎ →‎Important Warnings: explain how to bring warnings window to front Tag: Visual edit
curprev 11:1711:17, 28 June 2023‎ John d talk contribs‎ 6,905 bytes +160‎ →‎IQC (Image Quality Control) Calibration Check: added subheading for “exposing with IQC correction” Tag: Visual edit

curprev 17:4317:43, 11 January 2022‎ John d talk contribs‎ 7,408 bytes +675‎ →‎IQC (Image Quality Control) Calibration Check: method for adding focus correction to exposure Tag: Visual edit: Switched

curprev 04:5104:51, 28 October 2021‎ John d talk contribs‎ m 6,733 bytes −5‎ corrected max. expansion to 200pm (current machine setting) Tag: Visual edit
curprev 04:4904:49, 28 October 2021‎ John d talk contribs‎ 6,738 bytes +837‎ added Wafer Expansion workaround Tag: Visual edit

curprev 19:5019:50, 4 September 2021‎ Jcrode talk contribs‎ 5,901 bytes −3‎ Text replacement - "/wiki/index.php" to "/w/index.php"
curprev 19:4619:46, 4 September 2021‎ Jcrode talk contribs‎ 5,904 bytes +6‎ Text replacement - "/wiki/index.php/" to "/wiki/index.php?title="

curprev 05:5605:56, 29 April 2021‎ John d talk contribs‎ 5,898 bytes +443‎ →‎Common Warnings: updated warnings Tag: Visual edit

curprev 19:4419:44, 22 October 2020‎ John d talk contribs‎ 5,455 bytes +252‎ →‎Error Log full: updated procedures Tag: Visual edit

curprev 20:0020:00, 30 May 2020‎ John d talk contribs‎ 5,203 bytes +215‎ →‎IQC (Image Quality Control) Calibration Check: added screenshot of IQC results screen Tag: Visual edit

curprev 23:5023:50, 28 May 2020‎ John d talk contribs‎ 4,988 bytes +562‎ →‎Error Log full: added Laser refill warning Tag: Visual edit
curprev 23:4523:45, 28 May 2020‎ John d talk contribs‎ 4,426 bytes +259‎ →‎IQC (Image Quality Control) Calibration Check: added brief description of utility Tag: Visual edit
curprev 23:1423:14, 28 May 2020‎ John d talk contribs‎ m 4,167 bytes +6‎ →‎IQC (Image Quality Control) Calibration Check: bolded button Tag: Visual edit
curprev 23:1423:14, 28 May 2020‎ John d talk contribs‎ 4,161 bytes +172‎ →‎IQC (Image Quality Control) Calibration Check: added to record in logbook Tag: Visual edit

curprev 01:3101:31, 7 April 2020‎ Jcrode talk contribs‎ 3,989 bytes +1‎ Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/"

curprev 17:2517:25, 19 December 2019‎ John d talk contribs‎ m 3,988 bytes −3‎ typo Tag: Visual edit
curprev 17:2517:25, 19 December 2019‎ John d talk contribs‎ 3,991 bytes +192‎ added some common warnings Tag: Visual edit

curprev 15:3415:34, 5 October 2018‎ John d talk contribs‎ 3,799 bytes +1,259‎ moved some procedures onto this one common page Tag: Visual edit
curprev 15:0315:03, 5 October 2018‎ John d talk contribs‎ 2,540 bytes +184‎ link to wafer recovery page Tag: Visual edit
curprev 15:0015:00, 5 October 2018‎ John d talk contribs‎ m 2,356 bytes −62‎ →‎Error, Calibration, Error logging Procedures for Users: deleted heading Tag: Visual edit

curprev 21:3921:39, 17 July 2018‎ John d talk contribs‎ m 2,418 bytes +6‎ →‎Wafer Recovery / Wafer Handler Issues during Batch operation: bold Tag: Visual edit
curprev 21:3821:38, 17 July 2018‎ John d talk contribs‎ m 2,412 bytes −10‎ →‎Error, Calibration, Error logging Procedures for Users: remove header formatting Tag: Visual edit
curprev 21:3521:35, 17 July 2018‎ John d talk contribs‎ m 2,422 bytes +293‎ moved wafer recovery to top Tag: Visual edit
curprev 21:3121:31, 17 July 2018‎ John d talk contribs‎ 2,129 bytes +2,129‎ copy/pasted BT's procedures, fomratting Tag: Visual edit

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