E-Beam Lithography System (JEOL JBX-6300FS): Revision history

15 August 2022

• curprev 06:2806:28, 15 August 2022‎ John d talk contribs‎ 5,203 bytes +4‎ added "JBX-" to model #

5 November 2020

• curprev 17:5217:52, 5 November 2020‎ John d talk contribs‎ 5,199 bytes +20‎ added wafer load size Tag: Visual edit

14 September 2020

• curprev 04:0804:08, 14 September 2020‎ John d talk contribs‎ m 5,179 bytes −35‎ deleted erroneous fiels in {tool} template

31 October 2017

• curprev 17:4317:43, 31 October 2017‎ Mitchell b talk contribs‎ 5,214 bytes +1‎ →‎Detailed Specifications
• curprev 17:4117:41, 31 October 2017‎ Mitchell b talk contribs‎ 5,213 bytes +2‎ →‎Detailed Specifications
• curprev 17:3717:37, 31 October 2017‎ Mitchell b talk contribs‎ 5,211 bytes +1‎ →‎Detailed Specifications
• curprev 17:3617:36, 31 October 2017‎ Mitchell b talk contribs‎ 5,210 bytes +1,113‎ →‎Electron Beam Resists
• curprev 17:1017:10, 31 October 2017‎ Mitchell b talk contribs‎ 4,097 bytes +121‎ →‎Detailed Specifications

7 April 2015

• curprev 21:2021:20, 7 April 2015‎ Mitchell talk contribs‎ 3,976 bytes +518‎ →‎Detailed Specifications

11 July 2012

• curprev 13:5513:55, 11 July 2012‎ Zwarburg talk contribs‎ 3,458 bytes +11‎ No edit summary

10 July 2012

• curprev 16:4816:48, 10 July 2012‎ Mitchell talk contribs‎ 3,447 bytes −2‎ →‎Applications
• curprev 16:4716:47, 10 July 2012‎ Mitchell talk contribs‎ 3,449 bytes −18‎ →‎About
• curprev 16:4616:46, 10 July 2012‎ Mitchell talk contribs‎ 3,467 bytes +1‎ →‎Detailed Specifications

30 June 2012

• curprev 23:2323:23, 30 June 2012‎ Zwarburg talk contribs‎ 3,466 bytes −6‎ No edit summary
• curprev 23:2223:22, 30 June 2012‎ Zwarburg talk contribs‎ 3,472 bytes +1,768‎ →‎See Also
• curprev 23:1923:19, 30 June 2012‎ Zwarburg talk contribs‎ 1,704 bytes +1,704‎ Created page with "{{tool|{{PAGENAME}} |picture=AFMNanoman.jpg |type = Lithography |super= Bill Mitchell |phone= (805)893-4974 |location=Bay 7 |email=mitchell@ece.ucsb.edu |description = Vector Sca…"