File:Cal vs Legacy DSE.png: Revision history

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8 October 2024

  • curprev 20:3220:32, 8 October 2024Noahdutra talk contribs 151 bytes +151 Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio.