User contributions for Noahdutra

5 March 2025

• 17:4417:44, 5 March 2025 diff hist 0‎ Dry Etching Recipes ‎ Added R6 for GaAs etch on ICP2 Tag: Visual edit

6 February 2025

• 01:1601:16, 6 February 2025 diff hist −62‎ Noah Dutra ‎No edit summary current Tag: Visual edit

20 December 2024

• 17:0617:06, 20 December 2024 diff hist +63‎ Noah Dutra ‎ →‎About: Added "About" Section Tag: Visual edit

27 November 2024

• 23:0423:04, 27 November 2024 diff hist +46‎ Oxford ICP Etcher (PlasmaPro 100 Cobra) ‎ →‎GaN Etch (Cl2/BCl3/Ar/200°C): Added recipe name for GaN current Tag: Visual edit
• 23:0323:03, 27 November 2024 diff hist +46‎ ICP Etching Recipes ‎ →‎Process Control Data for "GaN Etch" (Cl2/BCl3/Ar/200°C): Added recipe name for GaN Tag: Visual edit
• 22:5722:57, 27 November 2024 diff hist +46‎ Process Group - Process Control Data ‎ →‎GaN Etch (Cl2/BCl3/Ar/200°C): Added recipe name for public GaN etch Tag: Visual edit
• 21:2921:29, 27 November 2024 diff hist +128‎ ICP Etching Recipes ‎ →‎Si Etching (Fluorine ICP Etcher): Added Image Tag: Visual edit
• 21:2521:25, 27 November 2024 diff hist +42‎ N File:Dot Facet 00.jpg ‎ GaN etch, credit: Gopi Meena current
• 21:2321:23, 27 November 2024 diff hist +511‎ ICP Etching Recipes ‎ →‎Process Control Data for "GaN Etch" (Cl2/BCl3/Ar/200°C): Added GaN Tag: Visual edit
• 21:2221:22, 27 November 2024 diff hist +509‎ Oxford ICP Etcher (PlasmaPro 100 Cobra) ‎ →‎GaN Etch (Cl2/BCl3/Ar/200°C) Tag: Visual edit
• 21:2021:20, 27 November 2024 diff hist −102‎ Process Group - Process Control Data ‎ →‎GaN Etch (Cl2/BCl3/Ar/200°C) Tag: Visual edit
• 21:1921:19, 27 November 2024 diff hist +170‎ Process Group - Process Control Data ‎ →‎GaN Etch (Cl2/BCl3/Ar/200°C)
• 21:1021:10, 27 November 2024 diff hist +465‎ Process Group - Process Control Data ‎ →‎GaN Etch (Cl2/BCl3/Ar/200°C): Added things to GaN etch SPC Tag: Visual edit
• 21:0221:02, 27 November 2024 diff hist +48‎ N File:GaN SPC.png ‎ GaN SPC chart for etch cal on OXFD current
• 20:4820:48, 27 November 2024 diff hist 0‎ Dry Etching Recipes ‎ changed OXFD GaN etch to R6 Tag: Visual edit

7 November 2024

• 21:5721:57, 7 November 2024 diff hist +94‎ Vacuum Deposition Recipes ‎ Added AuSn to Thermal evap 2 Tag: Visual edit
• 21:4921:49, 7 November 2024 diff hist −2,440‎ Vacuum Deposition Recipes ‎ changing thermal evaps to be correct Tag: Visual edit

30 October 2024

• 23:5823:58, 30 October 2024 diff hist −55‎ Vacuum Deposition Recipes ‎No edit summary Tag: Visual edit

22 October 2024

• 00:4100:41, 22 October 2024 diff hist 0‎ Dry Etching Recipes ‎ Changed FICP Si to R6 and OXFD GaN to R3 Tag: Visual edit

9 October 2024

• 23:3923:39, 9 October 2024 diff hist −30‎ ICP Etching Recipes ‎ →‎Process Control Data (DSEiii): took off SiO2/Al2O3 selectivity for dse Tag: Visual edit

8 October 2024

• 21:2921:29, 8 October 2024 diff hist −1‎ ICP Etching Recipes ‎ →‎Process Control Data (DSEiii): more details for the etch Tag: Visual edit
• 21:0321:03, 8 October 2024 diff hist +52‎ N File:Cal DSE Ar+ER.png ‎ DSE STD_Bosch_Si etch AR/ER dependence current
• 21:0121:01, 8 October 2024 diff hist +124‎ ICP Etching Recipes ‎ →‎Process Control Data (DSEiii)
• 20:5920:59, 8 October 2024 diff hist +124‎ ICP Etching Recipes ‎ →‎Si Etching (Fluorine ICP Etcher)
• 20:5720:57, 8 October 2024 diff hist −124‎ ICP Etching Recipes ‎ →‎Si Etching (Fluorine ICP Etcher)
• 20:5420:54, 8 October 2024 diff hist −94‎ ICP Etching Recipes ‎ →‎Process Control Data (DSEiii)
• 20:5420:54, 8 October 2024 diff hist +94‎ ICP Etching Recipes ‎ →‎Process Control Data (DSEiii)
• 20:5120:51, 8 October 2024 diff hist −106‎ ICP Etching Recipes ‎ →‎Process Control Data (DSEiii)
• 20:4920:49, 8 October 2024 diff hist +106‎ ICP Etching Recipes ‎ →‎Process Control Data (DSEiii)
• 20:4720:47, 8 October 2024 diff hist −93‎ ICP Etching Recipes ‎ →‎DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): DSE calibration etch information Tag: Visual edit
• 20:4420:44, 8 October 2024 diff hist +42‎ N File:DSE 16um Bosch Etch - 22 013.jpg ‎ STD_Bosch_Si example 8/26/24
• 20:4220:42, 8 October 2024 diff hist +39‎ N File:30D 003.jpg ‎ STD_Bosch_Si etch picture current
• 20:3720:37, 8 October 2024 diff hist +38‎ N File:DSE plot.png ‎ Calibration plot for DSE current
• 20:3320:33, 8 October 2024 diff hist +1,340‎ ICP Etching Recipes ‎ →‎High Rate Bosch Etch (DSEIII): Preliminary changes to DSE site Tag: Visual edit
• 20:3220:32, 8 October 2024 diff hist +151‎ N File:Cal vs Legacy DSE.png ‎ Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio. current

4 October 2024

• 22:3122:31, 4 October 2024 diff hist 0‎ Dry Etching Recipes ‎ changed Oxford GaAs to R2 since we have no data, but there is a recipe on the tool. Tag: Visual edit

2 October 2024

• 17:3217:32, 2 October 2024 diff hist +223‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Process Control Data: added picture to this page for Si etch Tag: Visual edit

30 September 2024

• 16:3616:36, 30 September 2024 diff hist +157‎ ICP Etching Recipes ‎ Added a photo attributed to the SiVertHFv2 cal recipe Tag: Visual edit
• 16:2316:23, 30 September 2024 diff hist +34‎ N File:PRStrip 019 (1).jpg ‎ Si Etch FICP 9/19/24 current
• 16:1516:15, 30 September 2024 diff hist +23‎ N File:PRStrip 022 (1).jpg ‎No edit summary current

16 September 2024

• 11:4711:47, 16 September 2024 diff hist −111‎ Noah Dutra ‎No edit summary Tag: Visual edit

13 September 2024

• 21:0621:06, 13 September 2024 diff hist +83‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Process Control Data
• 21:0521:05, 13 September 2024 diff hist +140‎ ICP Etching Recipes ‎ →‎Si Etching (Fluorine ICP Etcher)
• 20:5920:59, 13 September 2024 diff hist −26‎ ICP Etching Recipes ‎ →‎Si Etching (Fluorine ICP Etcher) Tag: Visual edit
• 20:5820:58, 13 September 2024 diff hist +754‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Process Control Data Tag: Visual edit
• 20:5220:52, 13 September 2024 diff hist 0‎ Dry Etching Recipes ‎No edit summary Tag: Visual edit
• 20:4220:42, 13 September 2024 diff hist −84‎ ICP Etching Recipes ‎No edit summary Tag: Visual edit
• 20:4020:40, 13 September 2024 diff hist +896‎ ICP Etching Recipes ‎ →‎Si Etching (Fluorine ICP Etcher) Tag: Visual edit
• 20:3220:32, 13 September 2024 diff hist +48‎ N File:FICP-Si.png ‎ Fluorine ICP Si Etch Control Chart current

24 August 2024

• 00:1100:11, 24 August 2024 diff hist +4,913‎ Vacuum Deposition Recipes ‎ added Thermal Evap rankings to wiki Tag: Visual edit