User contributions for Noahdutra
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25 September 2025
- 21:3521:35, 25 September 2025 diff hist −9 Process Group - Process Control Data →Unaxis VLR Etch - Process Control current Tag: Visual edit
22 August 2025
- 20:0020:00, 22 August 2025 diff hist +35 Dry Etching Recipes →Process Ranking Table: adding to R4 definition current Tag: Visual edit
- 19:5919:59, 22 August 2025 diff hist +35 Vacuum Deposition Recipes →Process Ranking Table: adding to R4 definition current Tag: Visual edit
- 19:5919:59, 22 August 2025 diff hist +35 Lithography Recipes →Process Ranking Table: adding to R4 definition Tag: Visual edit
21 August 2025
- 22:1022:10, 21 August 2025 diff hist −76 Vacuum Deposition Recipes No edit summary Tag: Visual edit
- 22:0922:09, 21 August 2025 diff hist +25 Vacuum Deposition Recipes R3s on Sputter4 Tag: Visual edit
- 21:1521:15, 21 August 2025 diff hist −96 Lithography Recipes →Process Ranking Table: changed ranking table and all R4s to R3s Tag: Visual edit
- 21:1021:10, 21 August 2025 diff hist −104 Vacuum Deposition Recipes →Process Ranking Table: adjusted R4s to R3s, and added new table definition at bottom Tag: Visual edit
- 21:0421:04, 21 August 2025 diff hist −93 Dry Etching Recipes adding new table and moving R4s to R3s Tag: Visual edit
- 17:4917:49, 21 August 2025 diff hist +4 Process Group - Process Control Data →Sputter 5: Ti: corrected Sputter 5 plots link Tag: Visual edit
- 17:4717:47, 21 August 2025 diff hist +932 Process Group - Process Control Data Added sputter 5 control data Tag: Visual edit
- 17:3217:32, 21 August 2025 diff hist 0 Vacuum Deposition Recipes adding R6 to Sputter 5 Cr/Ti/Al Tag: Visual edit
14 August 2025
- 21:4121:41, 14 August 2025 diff hist 0 Vacuum Deposition Recipes No edit summary Tag: Visual edit
- 21:3521:35, 14 August 2025 diff hist −12 Vacuum Deposition Recipes Moved R1 to SP5 and off of SP3-4 for HfO2, moved R1 for Pd to SP3-5 Tag: Visual edit
- 21:2921:29, 14 August 2025 diff hist −685 Vacuum Deposition Recipes deleting As, Be, all Cd compounds, Ga, GaAs, InSb, Pb, PbS, Sb, Se, SiOx (SiO accounts for this), TiO, ZnS from dep list. Also removed TaO from EB4, and demoted GeO2 to R1 Tag: Visual edit
- 21:2221:22, 14 August 2025 diff hist 0 Lithography Recipes made R3s into R4 Tag: Visual edit
- 21:1821:18, 14 August 2025 diff hist +1 Dry Etching Recipes made all R3s into R4s, could do a lookahead. Each R4 should have a procedure Tag: Visual edit
- 21:1021:10, 14 August 2025 diff hist 0 Vacuum Deposition Recipes added R4s to all dep, could do a look ahead. all R4s should have written procedures and data Tag: Visual edit
- 21:0521:05, 14 August 2025 diff hist 0 Vacuum Deposition Recipes R4s to Ebeam1 and 2 Tag: Visual edit
- 20:4920:49, 14 August 2025 diff hist 0 Vacuum Deposition Recipes changed all sputter 3-5 R3s into R4s because I'm assuming we can have control with lookaheads Tag: Visual edit
- 20:4120:41, 14 August 2025 diff hist −2 Vacuum Deposition Recipes adding R3 to Au Sputter 5 Tag: Visual edit
- 20:4020:40, 14 August 2025 diff hist −4 Vacuum Deposition Recipes IBD AlO and TiO to R4 Tag: Visual edit
- 20:3920:39, 14 August 2025 diff hist 0 Dry Etching Recipes adding R4s to FICP W/TiW and OXFD GaAs Tag: Visual edit
- 17:2717:27, 14 August 2025 diff hist −6 Process Group - Process Control Data →GaAs Etch with N2/Cl2 - Process Control Data (Panasonic 2): error happened last time Tag: Visual edit
- 17:2617:26, 14 August 2025 diff hist +877 Process Group - Process Control Data →Panasonic ICP#2 - Process Control: added ICP2 GaAs to Process control Tag: Visual edit
- 17:2417:24, 14 August 2025 diff hist +124 ICP Etching Recipes →Process Control Data (Panasonic 2)
- 17:2317:23, 14 August 2025 diff hist +1,052 ICP Etching Recipes →GaAs Etch (Panasonic 2): adding GaAs etch to ICP2 Tag: Visual edit
- 17:1517:15, 14 August 2025 diff hist 0 N File:GaAs Etch ICP2 SPC.png No edit summary current
- 17:1517:15, 14 August 2025 diff hist 0 N File:GaAs pressure experiment.png No edit summary current
13 August 2025
- 19:2719:27, 13 August 2025 diff hist +38 Process Group - Process Control Data →NEW Std InP Ridge Etch Cl2/H2/Ar/200°C: Taking away NEW/OLD labels on InP etches Tag: Visual edit
- 19:2619:26, 13 August 2025 diff hist −8 ICP Etching Recipes →InP Ridge Etch (Oxford ICP Etcher): took away NEW/OLD labels for InP etches Tag: Visual edit
12 August 2025
- 23:5523:55, 12 August 2025 diff hist +124 Process Group - Process Control Data →NEW Std InP Ridge Etch Cl2/H2/Ar/200°C
- 23:5423:54, 12 August 2025 diff hist −129 Process Group - Process Control Data →NEW Std InP Ridge Etch Cl2/H2/Ar/200°C Tag: Visual edit
- 23:5323:53, 12 August 2025 diff hist +969 Process Group - Process Control Data →InP Ridge Etch: Cl2/CH4/H2/60°C: adding 200C InP for OXFD Tag: Visual edit
- 23:5123:51, 12 August 2025 diff hist 0 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher) Tag: Visual edit
- 23:4823:48, 12 August 2025 diff hist +124 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher)
- 23:4523:45, 12 August 2025 diff hist +18 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher) Tag: Visual edit
- 23:4423:44, 12 August 2025 diff hist −131 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): added more 200C info Tag: Visual edit
- 23:4123:41, 12 August 2025 diff hist 0 N File:200C InP.png No edit summary current
- 23:4123:41, 12 August 2025 diff hist +1,566 ICP Etching Recipes →Low-Temp (60°C) Process: Adding 200C InP Tag: Visual edit
- 17:5817:58, 12 August 2025 diff hist 0 Dry Etching Recipes updating FICP to have W and TiW to R3 Tag: Visual edit
- 17:5617:56, 12 August 2025 diff hist 0 Vacuum Deposition Recipes Demoted IBD AlO and TiO to R3 which is correct ranking due to not >= 4 data per year Tag: Visual edit
- 17:0917:09, 12 August 2025 diff hist 0 Vacuum Deposition Recipes Bringing Sputter 5 Ti, Al, Cr to R5 (once the details are put on the wiki, we will update these all to R6) Tag: Visual edit
- 16:5416:54, 12 August 2025 diff hist 0 Vacuum Deposition Recipes Updating Ti, Au, Cr, Ni to R6 for Ebeam1 Tag: Visual edit
- 16:3816:38, 12 August 2025 diff hist 0 Dry Etching Recipes GaAs etch on OXFD Cobra to R3 Tag: Visual edit
- 16:3216:32, 12 August 2025 diff hist 0 Vacuum Deposition Recipes updating Ebeam1 rankings Tag: Visual edit
24 July 2025
- 17:2017:20, 24 July 2025 diff hist +111 Vacuum Deposition Recipes added PECVD2 3xtime "R6" to table Tag: Visual edit
- 17:1417:14, 24 July 2025 diff hist +122 SEM 1 (JEOL IT800SHL) →Operating Procedures: Added CalTech Resource on SEM imaging concepts in "operating procedures" section at bottom of page Tag: Visual edit
23 July 2025
- 00:1100:11, 23 July 2025 diff hist +1 Process Group Interns edited intern dates Tag: Visual edit
18 July 2025
- 23:1923:19, 18 July 2025 diff hist +110 Process Group Interns →Alumni: Updated Interns Tag: Visual edit