Difference between revisions of "Template:Announcements"
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+ | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
| + | We have finished calibrations, |
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| − | I will have to take the AFM head unit back to Bruker for repair. The height sensor failed all the tests I tried so the Z-piezo/strain gauge unit will most likely need to be replaced. SO for the foreseeable future, the AFM is down.--Demis |
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| + | System is up. |
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| + | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| − | The new board did not resolve the issue with the TSA. Our vendor had me try a few things to no avail. Waiting to see how we are proceeding. |
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| + | //11:17, 24 May 2024 (PDT) |
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| − | Tool is still up for backside alignment. |
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| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | //[[User:Mehalana v|Vraj Mehalana]] |
+ | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| + | -Lee |
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| + | //15:59, 22 May 2024 (PDT) |
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=====Velion FIB Tool DOWN===== |
=====Velion FIB Tool DOWN===== |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| − | =====ASML optics replacement May 20th-22nd===== |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| − | We will be performing beam delivery optics replacement on Mon May 20th to 22nd, to resolve a low intensity reading. The tool will be unavailable during this time.e. |
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| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 09:40, 9 May 2024 (PDT) |
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| + | Sorry for the inconvenience. |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| − | Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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| − | // [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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| + | -Physical card |
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| + | -Mobile phone via Symmetry App |
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| + | //10:54, 23 May 2024 (PDT) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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Latest revision as of 11:17, 24 May 2024
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
//11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)